11/20/2012	12:49:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	12:49:49 PM	Recipe started at 12:49 PM
11/20/2012	12:49:49 PM	Helium valve closed
11/20/2012	12:49:49 PM	H2 valve closed
11/20/2012	12:49:49 PM	BCl3 valve closed
11/20/2012	12:49:49 PM	PH3 valve closed
11/20/2012	12:49:49 PM	SiCl4 pre valve closed
11/20/2012	12:49:49 PM	SiCl4 post valve closed
11/20/2012	12:49:49 PM	Main Vac valve closed
11/20/2012	12:49:49 PM	Bypass valve closed
11/20/2012	12:49:49 PM	Bubbler valve closed
11/20/2012	12:49:49 PM	Helium MFC set to  0.000000
11/20/2012	12:49:49 PM	H2 MFC set to  0.000000
11/20/2012	12:49:49 PM	BCl3 MFC set to  0.000000
11/20/2012	12:49:49 PM	PH3 MFC set to  0.000000
11/20/2012	12:49:49 PM	SiCl4 MFC set to  0.000000
11/20/2012	12:49:49 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	12:49:49 PM	Tube furnace set to 0
11/20/2012	12:49:52 PM	H2 valve closed
11/20/2012	12:49:52 PM	BCl3 valve closed
11/20/2012	12:49:52 PM	PH3 valve closed
11/20/2012	12:49:52 PM	SiCl4 pre valve closed
11/20/2012	12:49:52 PM	SiCl4 post valve closed
11/20/2012	12:49:52 PM	Main Vac valve closed
11/20/2012	12:49:52 PM	Bypass valve closed
11/20/2012	12:49:52 PM	Bubbler valve closed
11/20/2012	12:49:52 PM	Helium valve opened
11/20/2012	12:49:52 PM	Helium MFC set to  500.000000
11/20/2012	12:49:52 PM	H2 MFC set to  0.000000
11/20/2012	12:49:52 PM	BCl3 MFC set to  0.000000
11/20/2012	12:49:52 PM	PH3 MFC set to  0.000000
11/20/2012	12:49:52 PM	SiCl4 MFC set to  0.000000
11/20/2012	12:49:52 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	12:49:52 PM	Tube furnace set to 0
11/20/2012	12:51:05 PM	Helium valve closed
11/20/2012	12:51:05 PM	H2 valve closed
11/20/2012	12:51:05 PM	BCl3 valve closed
11/20/2012	12:51:05 PM	PH3 valve closed
11/20/2012	12:51:05 PM	SiCl4 pre valve closed
11/20/2012	12:51:05 PM	SiCl4 post valve closed
11/20/2012	12:51:05 PM	Main Vac valve closed
11/20/2012	12:51:05 PM	Bypass valve closed
11/20/2012	12:51:05 PM	Bubbler valve closed
11/20/2012	12:51:05 PM	Helium MFC set to  0.000000
11/20/2012	12:51:05 PM	H2 MFC set to  0.000000
11/20/2012	12:51:05 PM	BCl3 MFC set to  0.000000
11/20/2012	12:51:05 PM	PH3 MFC set to  0.000000
11/20/2012	12:51:05 PM	SiCl4 MFC set to  0.000000
11/20/2012	12:51:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	12:51:05 PM	Tube furnace set to 0
11/20/2012	12:51:06 PM	Run finished at 12:51 PM
11/20/2012	12:51:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	1:05:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	1:05:35 PM	Recipe started at 1:05 PM
11/20/2012	1:05:35 PM	Helium valve closed
11/20/2012	1:05:35 PM	H2 valve closed
11/20/2012	1:05:35 PM	BCl3 valve closed
11/20/2012	1:05:35 PM	PH3 valve closed
11/20/2012	1:05:35 PM	SiCl4 pre valve closed
11/20/2012	1:05:35 PM	SiCl4 post valve closed
11/20/2012	1:05:35 PM	Main Vac valve closed
11/20/2012	1:05:35 PM	Bubbler valve closed
11/20/2012	1:05:35 PM	Bypass valve opened
11/20/2012	1:05:35 PM	Helium MFC set to  0.000000
11/20/2012	1:05:35 PM	H2 MFC set to  0.000000
11/20/2012	1:05:35 PM	BCl3 MFC set to  0.000000
11/20/2012	1:05:35 PM	PH3 MFC set to  0.000000
11/20/2012	1:05:35 PM	SiCl4 MFC set to  0.000000
11/20/2012	1:05:35 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	1:05:36 PM	Tube furnace set to 0
11/20/2012	1:06:58 PM	Helium valve closed
11/20/2012	1:06:58 PM	H2 valve closed
11/20/2012	1:06:58 PM	BCl3 valve closed
11/20/2012	1:06:58 PM	PH3 valve closed
11/20/2012	1:06:58 PM	SiCl4 pre valve closed
11/20/2012	1:06:58 PM	SiCl4 post valve closed
11/20/2012	1:06:58 PM	Main Vac valve closed
11/20/2012	1:06:58 PM	Bubbler valve closed
11/20/2012	1:06:58 PM	Bypass valve opened
11/20/2012	1:06:58 PM	Helium MFC set to  0.000000
11/20/2012	1:06:58 PM	H2 MFC set to  0.000000
11/20/2012	1:06:58 PM	BCl3 MFC set to  0.000000
11/20/2012	1:06:58 PM	PH3 MFC set to  0.000000
11/20/2012	1:06:58 PM	SiCl4 MFC set to  0.000000
11/20/2012	1:06:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	1:06:58 PM	Tube furnace set to 0
11/20/2012	1:07:58 PM	Helium valve closed
11/20/2012	1:07:58 PM	H2 valve closed
11/20/2012	1:07:58 PM	BCl3 valve closed
11/20/2012	1:07:58 PM	PH3 valve closed
11/20/2012	1:07:58 PM	SiCl4 pre valve closed
11/20/2012	1:07:58 PM	SiCl4 post valve closed
11/20/2012	1:07:58 PM	Bypass valve closed
11/20/2012	1:07:58 PM	Bubbler valve closed
11/20/2012	1:07:58 PM	Main Vac valve opened
11/20/2012	1:07:58 PM	Helium MFC set to  0.000000
11/20/2012	1:07:58 PM	H2 MFC set to  0.000000
11/20/2012	1:07:58 PM	BCl3 MFC set to  0.000000
11/20/2012	1:07:58 PM	PH3 MFC set to  0.000000
11/20/2012	1:07:58 PM	SiCl4 MFC set to  0.000000
11/20/2012	1:07:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	1:07:58 PM	Tube furnace set to 0
11/20/2012	1:07:59 PM	Run finished at 1:07 PM
11/20/2012	1:07:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	2:29:05 PM	Recipe started at 2:29 PM
11/20/2012	2:29:05 PM	Helium valve closed
11/20/2012	2:29:05 PM	H2 valve closed
11/20/2012	2:29:05 PM	BCl3 valve closed
11/20/2012	2:29:05 PM	PH3 valve closed
11/20/2012	2:29:05 PM	SiCl4 pre valve closed
11/20/2012	2:29:05 PM	SiCl4 post valve closed
11/20/2012	2:29:05 PM	Bypass valve closed
11/20/2012	2:29:05 PM	Bubbler valve closed
11/20/2012	2:29:05 PM	Main Vac valve opened
11/20/2012	2:29:05 PM	Helium MFC set to  0.000000
11/20/2012	2:29:05 PM	H2 MFC set to  0.000000
11/20/2012	2:29:05 PM	BCl3 MFC set to  0.000000
11/20/2012	2:29:05 PM	PH3 MFC set to  0.000000
11/20/2012	2:29:05 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:29:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:29:05 PM	Tube furnace set to 200
11/20/2012	2:29:23 PM	H2 valve closed
11/20/2012	2:29:23 PM	BCl3 valve closed
11/20/2012	2:29:23 PM	PH3 valve closed
11/20/2012	2:29:23 PM	SiCl4 pre valve closed
11/20/2012	2:29:23 PM	SiCl4 post valve closed
11/20/2012	2:29:23 PM	Bypass valve closed
11/20/2012	2:29:23 PM	Bubbler valve closed
11/20/2012	2:29:23 PM	Helium valve opened
11/20/2012	2:29:23 PM	Main Vac valve opened
11/20/2012	2:29:23 PM	Helium MFC set to  20.000000
11/20/2012	2:29:23 PM	H2 MFC set to  0.000000
11/20/2012	2:29:23 PM	BCl3 MFC set to  0.000000
11/20/2012	2:29:23 PM	PH3 MFC set to  0.000000
11/20/2012	2:29:23 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:29:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:29:23 PM	Tube furnace set to 200
11/20/2012	2:29:53 PM	Helium valve closed
11/20/2012	2:29:53 PM	H2 valve closed
11/20/2012	2:29:53 PM	BCl3 valve closed
11/20/2012	2:29:53 PM	PH3 valve closed
11/20/2012	2:29:53 PM	SiCl4 pre valve closed
11/20/2012	2:29:53 PM	SiCl4 post valve closed
11/20/2012	2:29:53 PM	Bypass valve closed
11/20/2012	2:29:53 PM	Bubbler valve closed
11/20/2012	2:29:53 PM	Main Vac valve opened
11/20/2012	2:29:53 PM	Helium MFC set to  0.000000
11/20/2012	2:29:53 PM	H2 MFC set to  0.000000
11/20/2012	2:29:53 PM	BCl3 MFC set to  0.000000
11/20/2012	2:29:53 PM	PH3 MFC set to  0.000000
11/20/2012	2:29:53 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:29:53 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:29:53 PM	Tube furnace set to 200
11/20/2012	2:30:23 PM	H2 valve closed
11/20/2012	2:30:23 PM	BCl3 valve closed
11/20/2012	2:30:23 PM	PH3 valve closed
11/20/2012	2:30:23 PM	SiCl4 pre valve closed
11/20/2012	2:30:23 PM	SiCl4 post valve closed
11/20/2012	2:30:23 PM	Bypass valve closed
11/20/2012	2:30:23 PM	Bubbler valve closed
11/20/2012	2:30:23 PM	Helium valve opened
11/20/2012	2:30:23 PM	Main Vac valve opened
11/20/2012	2:30:23 PM	Helium MFC set to  20.000000
11/20/2012	2:30:23 PM	H2 MFC set to  0.000000
11/20/2012	2:30:23 PM	BCl3 MFC set to  0.000000
11/20/2012	2:30:23 PM	PH3 MFC set to  0.000000
11/20/2012	2:30:23 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:30:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:30:24 PM	Tube furnace set to 200
11/20/2012	2:30:54 PM	Helium valve closed
11/20/2012	2:30:54 PM	H2 valve closed
11/20/2012	2:30:54 PM	BCl3 valve closed
11/20/2012	2:30:54 PM	PH3 valve closed
11/20/2012	2:30:54 PM	SiCl4 pre valve closed
11/20/2012	2:30:54 PM	SiCl4 post valve closed
11/20/2012	2:30:54 PM	Bypass valve closed
11/20/2012	2:30:54 PM	Bubbler valve closed
11/20/2012	2:30:54 PM	Main Vac valve opened
11/20/2012	2:30:54 PM	Helium MFC set to  0.000000
11/20/2012	2:30:54 PM	H2 MFC set to  0.000000
11/20/2012	2:30:54 PM	BCl3 MFC set to  0.000000
11/20/2012	2:30:54 PM	PH3 MFC set to  0.000000
11/20/2012	2:30:54 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:30:54 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:30:54 PM	Tube furnace set to 200
11/20/2012	2:31:24 PM	H2 valve closed
11/20/2012	2:31:24 PM	BCl3 valve closed
11/20/2012	2:31:24 PM	PH3 valve closed
11/20/2012	2:31:24 PM	SiCl4 pre valve closed
11/20/2012	2:31:24 PM	SiCl4 post valve closed
11/20/2012	2:31:24 PM	Bypass valve closed
11/20/2012	2:31:24 PM	Bubbler valve closed
11/20/2012	2:31:24 PM	Helium valve opened
11/20/2012	2:31:24 PM	Main Vac valve opened
11/20/2012	2:31:24 PM	Helium MFC set to  20.000000
11/20/2012	2:31:24 PM	H2 MFC set to  0.000000
11/20/2012	2:31:24 PM	BCl3 MFC set to  0.000000
11/20/2012	2:31:24 PM	PH3 MFC set to  0.000000
11/20/2012	2:31:24 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:31:24 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:31:24 PM	Tube furnace set to 200
11/20/2012	2:31:54 PM	Helium valve closed
11/20/2012	2:31:54 PM	H2 valve closed
11/20/2012	2:31:54 PM	BCl3 valve closed
11/20/2012	2:31:54 PM	PH3 valve closed
11/20/2012	2:31:54 PM	SiCl4 pre valve closed
11/20/2012	2:31:54 PM	SiCl4 post valve closed
11/20/2012	2:31:54 PM	Bypass valve closed
11/20/2012	2:31:54 PM	Bubbler valve closed
11/20/2012	2:31:54 PM	Main Vac valve opened
11/20/2012	2:31:54 PM	Helium MFC set to  0.000000
11/20/2012	2:31:54 PM	H2 MFC set to  0.000000
11/20/2012	2:31:54 PM	BCl3 MFC set to  0.000000
11/20/2012	2:31:54 PM	PH3 MFC set to  0.000000
11/20/2012	2:31:54 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:31:54 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:31:54 PM	Tube furnace set to 200
11/20/2012	2:32:24 PM	H2 valve closed
11/20/2012	2:32:24 PM	BCl3 valve closed
11/20/2012	2:32:24 PM	PH3 valve closed
11/20/2012	2:32:24 PM	SiCl4 pre valve closed
11/20/2012	2:32:24 PM	SiCl4 post valve closed
11/20/2012	2:32:24 PM	Bypass valve closed
11/20/2012	2:32:24 PM	Bubbler valve closed
11/20/2012	2:32:24 PM	Helium valve opened
11/20/2012	2:32:24 PM	Main Vac valve opened
11/20/2012	2:32:24 PM	Helium MFC set to  20.000000
11/20/2012	2:32:24 PM	H2 MFC set to  0.000000
11/20/2012	2:32:24 PM	BCl3 MFC set to  0.000000
11/20/2012	2:32:24 PM	PH3 MFC set to  0.000000
11/20/2012	2:32:24 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:32:24 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:32:25 PM	Tube furnace set to 200
11/20/2012	2:32:55 PM	Helium valve closed
11/20/2012	2:32:55 PM	H2 valve closed
11/20/2012	2:32:55 PM	BCl3 valve closed
11/20/2012	2:32:55 PM	PH3 valve closed
11/20/2012	2:32:55 PM	SiCl4 pre valve closed
11/20/2012	2:32:55 PM	SiCl4 post valve closed
11/20/2012	2:32:55 PM	Bypass valve closed
11/20/2012	2:32:55 PM	Bubbler valve closed
11/20/2012	2:32:55 PM	Main Vac valve opened
11/20/2012	2:32:55 PM	Helium MFC set to  0.000000
11/20/2012	2:32:55 PM	H2 MFC set to  0.000000
11/20/2012	2:32:55 PM	BCl3 MFC set to  0.000000
11/20/2012	2:32:55 PM	PH3 MFC set to  0.000000
11/20/2012	2:32:55 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:32:55 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:32:55 PM	Tube furnace set to 200
11/20/2012	2:33:25 PM	H2 valve closed
11/20/2012	2:33:25 PM	BCl3 valve closed
11/20/2012	2:33:25 PM	PH3 valve closed
11/20/2012	2:33:25 PM	SiCl4 pre valve closed
11/20/2012	2:33:25 PM	SiCl4 post valve closed
11/20/2012	2:33:25 PM	Bypass valve closed
11/20/2012	2:33:25 PM	Bubbler valve closed
11/20/2012	2:33:25 PM	Helium valve opened
11/20/2012	2:33:25 PM	Main Vac valve opened
11/20/2012	2:33:25 PM	Helium MFC set to  20.000000
11/20/2012	2:33:25 PM	H2 MFC set to  0.000000
11/20/2012	2:33:25 PM	BCl3 MFC set to  0.000000
11/20/2012	2:33:25 PM	PH3 MFC set to  0.000000
11/20/2012	2:33:25 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:33:25 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:33:25 PM	Tube furnace set to 200
11/20/2012	2:33:55 PM	Helium valve closed
11/20/2012	2:33:55 PM	H2 valve closed
11/20/2012	2:33:55 PM	BCl3 valve closed
11/20/2012	2:33:55 PM	PH3 valve closed
11/20/2012	2:33:55 PM	SiCl4 pre valve closed
11/20/2012	2:33:55 PM	SiCl4 post valve closed
11/20/2012	2:33:55 PM	Bypass valve closed
11/20/2012	2:33:55 PM	Bubbler valve closed
11/20/2012	2:33:55 PM	Main Vac valve opened
11/20/2012	2:33:55 PM	Helium MFC set to  0.000000
11/20/2012	2:33:55 PM	H2 MFC set to  0.000000
11/20/2012	2:33:55 PM	BCl3 MFC set to  0.000000
11/20/2012	2:33:55 PM	PH3 MFC set to  0.000000
11/20/2012	2:33:55 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:33:55 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:33:55 PM	Tube furnace set to 200
11/20/2012	2:34:25 PM	H2 valve closed
11/20/2012	2:34:25 PM	BCl3 valve closed
11/20/2012	2:34:25 PM	PH3 valve closed
11/20/2012	2:34:25 PM	SiCl4 pre valve closed
11/20/2012	2:34:25 PM	SiCl4 post valve closed
11/20/2012	2:34:25 PM	Bypass valve closed
11/20/2012	2:34:25 PM	Bubbler valve closed
11/20/2012	2:34:25 PM	Helium valve opened
11/20/2012	2:34:25 PM	Main Vac valve opened
11/20/2012	2:34:25 PM	Helium MFC set to  20.000000
11/20/2012	2:34:25 PM	H2 MFC set to  0.000000
11/20/2012	2:34:25 PM	BCl3 MFC set to  0.000000
11/20/2012	2:34:25 PM	PH3 MFC set to  0.000000
11/20/2012	2:34:25 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:34:25 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:34:26 PM	Tube furnace set to 200
11/20/2012	2:34:56 PM	Helium valve closed
11/20/2012	2:34:56 PM	H2 valve closed
11/20/2012	2:34:56 PM	BCl3 valve closed
11/20/2012	2:34:56 PM	PH3 valve closed
11/20/2012	2:34:56 PM	SiCl4 pre valve closed
11/20/2012	2:34:56 PM	SiCl4 post valve closed
11/20/2012	2:34:56 PM	Bypass valve closed
11/20/2012	2:34:56 PM	Bubbler valve closed
11/20/2012	2:34:56 PM	Main Vac valve opened
11/20/2012	2:34:56 PM	Helium MFC set to  0.000000
11/20/2012	2:34:56 PM	H2 MFC set to  0.000000
11/20/2012	2:34:56 PM	BCl3 MFC set to  0.000000
11/20/2012	2:34:56 PM	PH3 MFC set to  0.000000
11/20/2012	2:34:56 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:34:56 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:34:56 PM	Tube furnace set to 200
11/20/2012	2:35:26 PM	H2 valve closed
11/20/2012	2:35:26 PM	BCl3 valve closed
11/20/2012	2:35:26 PM	PH3 valve closed
11/20/2012	2:35:26 PM	SiCl4 pre valve closed
11/20/2012	2:35:26 PM	SiCl4 post valve closed
11/20/2012	2:35:26 PM	Bypass valve closed
11/20/2012	2:35:26 PM	Bubbler valve closed
11/20/2012	2:35:26 PM	Helium valve opened
11/20/2012	2:35:26 PM	Main Vac valve opened
11/20/2012	2:35:26 PM	Helium MFC set to  20.000000
11/20/2012	2:35:26 PM	H2 MFC set to  0.000000
11/20/2012	2:35:26 PM	BCl3 MFC set to  0.000000
11/20/2012	2:35:26 PM	PH3 MFC set to  0.000000
11/20/2012	2:35:26 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:35:26 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:35:26 PM	Tube furnace set to 200
11/20/2012	2:35:56 PM	Helium valve closed
11/20/2012	2:35:56 PM	H2 valve closed
11/20/2012	2:35:56 PM	BCl3 valve closed
11/20/2012	2:35:56 PM	PH3 valve closed
11/20/2012	2:35:56 PM	SiCl4 pre valve closed
11/20/2012	2:35:56 PM	SiCl4 post valve closed
11/20/2012	2:35:56 PM	Bypass valve closed
11/20/2012	2:35:56 PM	Bubbler valve closed
11/20/2012	2:35:56 PM	Main Vac valve opened
11/20/2012	2:35:56 PM	Helium MFC set to  0.000000
11/20/2012	2:35:56 PM	H2 MFC set to  0.000000
11/20/2012	2:35:56 PM	BCl3 MFC set to  0.000000
11/20/2012	2:35:56 PM	PH3 MFC set to  0.000000
11/20/2012	2:35:56 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:35:56 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:35:56 PM	Tube furnace set to 200
11/20/2012	2:36:26 PM	H2 valve closed
11/20/2012	2:36:26 PM	BCl3 valve closed
11/20/2012	2:36:26 PM	PH3 valve closed
11/20/2012	2:36:26 PM	SiCl4 pre valve closed
11/20/2012	2:36:26 PM	SiCl4 post valve closed
11/20/2012	2:36:26 PM	Bypass valve closed
11/20/2012	2:36:26 PM	Bubbler valve closed
11/20/2012	2:36:26 PM	Helium valve opened
11/20/2012	2:36:26 PM	Main Vac valve opened
11/20/2012	2:36:26 PM	Helium MFC set to  20.000000
11/20/2012	2:36:26 PM	H2 MFC set to  0.000000
11/20/2012	2:36:26 PM	BCl3 MFC set to  0.000000
11/20/2012	2:36:26 PM	PH3 MFC set to  0.000000
11/20/2012	2:36:26 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:36:26 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:36:27 PM	Tube furnace set to 200
11/20/2012	2:36:57 PM	Helium valve closed
11/20/2012	2:36:57 PM	H2 valve closed
11/20/2012	2:36:57 PM	BCl3 valve closed
11/20/2012	2:36:57 PM	PH3 valve closed
11/20/2012	2:36:57 PM	SiCl4 pre valve closed
11/20/2012	2:36:57 PM	SiCl4 post valve closed
11/20/2012	2:36:57 PM	Bypass valve closed
11/20/2012	2:36:57 PM	Bubbler valve closed
11/20/2012	2:36:57 PM	Main Vac valve opened
11/20/2012	2:36:57 PM	Helium MFC set to  0.000000
11/20/2012	2:36:57 PM	H2 MFC set to  0.000000
11/20/2012	2:36:57 PM	BCl3 MFC set to  0.000000
11/20/2012	2:36:57 PM	PH3 MFC set to  0.000000
11/20/2012	2:36:57 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:36:57 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:36:57 PM	Tube furnace set to 200
11/20/2012	2:37:27 PM	H2 valve closed
11/20/2012	2:37:27 PM	BCl3 valve closed
11/20/2012	2:37:27 PM	PH3 valve closed
11/20/2012	2:37:27 PM	SiCl4 pre valve closed
11/20/2012	2:37:27 PM	SiCl4 post valve closed
11/20/2012	2:37:27 PM	Bypass valve closed
11/20/2012	2:37:27 PM	Bubbler valve closed
11/20/2012	2:37:27 PM	Helium valve opened
11/20/2012	2:37:27 PM	Main Vac valve opened
11/20/2012	2:37:27 PM	Helium MFC set to  20.000000
11/20/2012	2:37:27 PM	H2 MFC set to  0.000000
11/20/2012	2:37:27 PM	BCl3 MFC set to  0.000000
11/20/2012	2:37:27 PM	PH3 MFC set to  0.000000
11/20/2012	2:37:27 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:37:27 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:37:27 PM	Tube furnace set to 200
11/20/2012	2:37:57 PM	Helium valve closed
11/20/2012	2:37:57 PM	H2 valve closed
11/20/2012	2:37:57 PM	BCl3 valve closed
11/20/2012	2:37:57 PM	PH3 valve closed
11/20/2012	2:37:57 PM	SiCl4 pre valve closed
11/20/2012	2:37:57 PM	SiCl4 post valve closed
11/20/2012	2:37:57 PM	Bypass valve closed
11/20/2012	2:37:57 PM	Bubbler valve closed
11/20/2012	2:37:57 PM	Main Vac valve opened
11/20/2012	2:37:57 PM	Helium MFC set to  0.000000
11/20/2012	2:37:57 PM	H2 MFC set to  0.000000
11/20/2012	2:37:57 PM	BCl3 MFC set to  0.000000
11/20/2012	2:37:57 PM	PH3 MFC set to  0.000000
11/20/2012	2:37:57 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:37:57 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:37:57 PM	Tube furnace set to 200
11/20/2012	2:38:27 PM	H2 valve closed
11/20/2012	2:38:27 PM	BCl3 valve closed
11/20/2012	2:38:27 PM	PH3 valve closed
11/20/2012	2:38:27 PM	SiCl4 pre valve closed
11/20/2012	2:38:27 PM	SiCl4 post valve closed
11/20/2012	2:38:27 PM	Bypass valve closed
11/20/2012	2:38:27 PM	Bubbler valve closed
11/20/2012	2:38:27 PM	Helium valve opened
11/20/2012	2:38:27 PM	Main Vac valve opened
11/20/2012	2:38:27 PM	Helium MFC set to  20.000000
11/20/2012	2:38:27 PM	H2 MFC set to  0.000000
11/20/2012	2:38:27 PM	BCl3 MFC set to  0.000000
11/20/2012	2:38:27 PM	PH3 MFC set to  0.000000
11/20/2012	2:38:27 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:38:27 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:38:28 PM	Tube furnace set to 200
11/20/2012	2:38:58 PM	Helium valve closed
11/20/2012	2:38:58 PM	H2 valve closed
11/20/2012	2:38:58 PM	BCl3 valve closed
11/20/2012	2:38:58 PM	PH3 valve closed
11/20/2012	2:38:58 PM	SiCl4 pre valve closed
11/20/2012	2:38:58 PM	SiCl4 post valve closed
11/20/2012	2:38:58 PM	Bypass valve closed
11/20/2012	2:38:58 PM	Bubbler valve closed
11/20/2012	2:38:58 PM	Main Vac valve opened
11/20/2012	2:38:58 PM	Helium MFC set to  0.000000
11/20/2012	2:38:58 PM	H2 MFC set to  0.000000
11/20/2012	2:38:58 PM	BCl3 MFC set to  0.000000
11/20/2012	2:38:58 PM	PH3 MFC set to  0.000000
11/20/2012	2:38:58 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:38:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:38:58 PM	Tube furnace set to 200
11/20/2012	2:38:59 PM	Run finished at 2:38 PM
11/20/2012	2:39:49 PM	Main Vac valve closed
11/20/2012	2:40:00 PM	Main Vac valve opened
11/20/2012	2:41:12 PM	Recipe started at 2:41 PM
11/20/2012	2:41:12 PM	Helium valve closed
11/20/2012	2:41:13 PM	H2 valve closed
11/20/2012	2:41:13 PM	BCl3 valve closed
11/20/2012	2:41:13 PM	PH3 valve closed
11/20/2012	2:41:13 PM	SiCl4 pre valve closed
11/20/2012	2:41:13 PM	SiCl4 post valve closed
11/20/2012	2:41:13 PM	Main Vac valve closed
11/20/2012	2:41:13 PM	Bypass valve closed
11/20/2012	2:41:13 PM	Bubbler valve closed
11/20/2012	2:41:13 PM	Helium MFC set to  0.000000
11/20/2012	2:41:13 PM	H2 MFC set to  0.000000
11/20/2012	2:41:13 PM	BCl3 MFC set to  0.000000
11/20/2012	2:41:13 PM	PH3 MFC set to  0.000000
11/20/2012	2:41:13 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:41:13 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:41:13 PM	Tube furnace set to 0
11/20/2012	2:41:16 PM	Helium valve closed
11/20/2012	2:41:16 PM	BCl3 valve closed
11/20/2012	2:41:16 PM	PH3 valve closed
11/20/2012	2:41:16 PM	SiCl4 pre valve closed
11/20/2012	2:41:16 PM	SiCl4 post valve closed
11/20/2012	2:41:16 PM	Main Vac valve closed
11/20/2012	2:41:16 PM	Bypass valve closed
11/20/2012	2:41:16 PM	Bubbler valve closed
11/20/2012	2:41:16 PM	H2 valve opened
11/20/2012	2:41:16 PM	Helium MFC set to  0.000000
11/20/2012	2:41:16 PM	H2 MFC set to  500.000000
11/20/2012	2:41:16 PM	BCl3 MFC set to  0.000000
11/20/2012	2:41:16 PM	PH3 MFC set to  0.000000
11/20/2012	2:41:16 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:41:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:41:16 PM	Tube furnace set to 0
11/20/2012	2:42:26 PM	Helium valve closed
11/20/2012	2:42:26 PM	BCl3 valve closed
11/20/2012	2:42:27 PM	PH3 valve closed
11/20/2012	2:42:27 PM	SiCl4 pre valve closed
11/20/2012	2:42:27 PM	SiCl4 post valve closed
11/20/2012	2:42:27 PM	Main Vac valve closed
11/20/2012	2:42:27 PM	Bypass valve closed
11/20/2012	2:42:27 PM	H2 valve opened
11/20/2012	2:42:27 PM	Bubbler valve opened
11/20/2012	2:42:27 PM	Helium MFC set to  0.000000
11/20/2012	2:42:27 PM	H2 MFC set to  500.000000
11/20/2012	2:42:27 PM	BCl3 MFC set to  0.000000
11/20/2012	2:42:27 PM	PH3 MFC set to  0.000000
11/20/2012	2:42:27 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:42:27 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:42:27 PM	Tube furnace set to 0
11/20/2012	2:42:28 PM	Helium valve closed
11/20/2012	2:42:28 PM	BCl3 valve closed
11/20/2012	2:42:28 PM	PH3 valve closed
11/20/2012	2:42:28 PM	SiCl4 pre valve closed
11/20/2012	2:42:28 PM	SiCl4 post valve closed
11/20/2012	2:42:28 PM	Main Vac valve closed
11/20/2012	2:42:28 PM	Bypass valve closed
11/20/2012	2:42:28 PM	H2 valve opened
11/20/2012	2:42:28 PM	Bubbler valve opened
11/20/2012	2:42:28 PM	Helium MFC set to  0.000000
11/20/2012	2:42:28 PM	H2 MFC set to  450.000000
11/20/2012	2:42:28 PM	BCl3 MFC set to  0.000000
11/20/2012	2:42:28 PM	PH3 MFC set to  0.000000
11/20/2012	2:42:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	2:42:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	2:42:28 PM	Tube furnace set to 1000
11/20/2012	3:07:28 PM	Helium valve closed
11/20/2012	3:07:28 PM	PH3 valve closed
11/20/2012	3:07:28 PM	Main Vac valve closed
11/20/2012	3:07:28 PM	Bypass valve closed
11/20/2012	3:07:28 PM	H2 valve opened
11/20/2012	3:07:28 PM	BCl3 valve opened
11/20/2012	3:07:28 PM	SiCl4 pre valve opened
11/20/2012	3:07:28 PM	SiCl4 post valve opened
11/20/2012	3:07:28 PM	Bubbler valve opened
11/20/2012	3:07:28 PM	Helium MFC set to  0.000000
11/20/2012	3:07:28 PM	H2 MFC set to  450.000000
11/20/2012	3:07:28 PM	BCl3 MFC set to  1.500000
11/20/2012	3:07:28 PM	PH3 MFC set to  0.000000
11/20/2012	3:07:28 PM	SiCl4 MFC set to  50.000000
11/20/2012	3:07:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:07:28 PM	Tube furnace set to 1000
11/20/2012	3:12:28 PM	Helium valve closed
11/20/2012	3:12:28 PM	BCl3 valve closed
11/20/2012	3:12:28 PM	PH3 valve closed
11/20/2012	3:12:28 PM	SiCl4 pre valve closed
11/20/2012	3:12:28 PM	SiCl4 post valve closed
11/20/2012	3:12:28 PM	Main Vac valve closed
11/20/2012	3:12:28 PM	Bypass valve closed
11/20/2012	3:12:28 PM	H2 valve opened
11/20/2012	3:12:28 PM	Bubbler valve opened
11/20/2012	3:12:28 PM	Helium MFC set to  0.000000
11/20/2012	3:12:28 PM	H2 MFC set to  500.000000
11/20/2012	3:12:28 PM	BCl3 MFC set to  0.000000
11/20/2012	3:12:28 PM	PH3 MFC set to  0.000000
11/20/2012	3:12:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:12:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:12:28 PM	Tube furnace set to 750
11/20/2012	3:17:28 PM	H2 valve closed
11/20/2012	3:17:28 PM	BCl3 valve closed
11/20/2012	3:17:28 PM	PH3 valve closed
11/20/2012	3:17:28 PM	SiCl4 pre valve closed
11/20/2012	3:17:28 PM	SiCl4 post valve closed
11/20/2012	3:17:28 PM	Main Vac valve closed
11/20/2012	3:17:28 PM	Bypass valve closed
11/20/2012	3:17:28 PM	Helium valve opened
11/20/2012	3:17:28 PM	Bubbler valve opened
11/20/2012	3:17:28 PM	Helium MFC set to  500.000000
11/20/2012	3:17:28 PM	H2 MFC set to  0.000000
11/20/2012	3:17:28 PM	BCl3 MFC set to  0.000000
11/20/2012	3:17:28 PM	PH3 MFC set to  0.000000
11/20/2012	3:17:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:17:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:17:29 PM	Tube furnace set to 0
11/20/2012	3:36:11 PM	Helium valve closed
11/20/2012	3:36:11 PM	H2 valve closed
11/20/2012	3:36:11 PM	BCl3 valve closed
11/20/2012	3:36:11 PM	PH3 valve closed
11/20/2012	3:36:11 PM	SiCl4 pre valve closed
11/20/2012	3:36:11 PM	SiCl4 post valve closed
11/20/2012	3:36:11 PM	Main Vac valve closed
11/20/2012	3:36:11 PM	Bypass valve closed
11/20/2012	3:36:11 PM	Bubbler valve closed
11/20/2012	3:36:11 PM	Helium MFC set to  0.000000
11/20/2012	3:36:11 PM	H2 MFC set to  0.000000
11/20/2012	3:36:11 PM	BCl3 MFC set to  0.000000
11/20/2012	3:36:11 PM	PH3 MFC set to  0.000000
11/20/2012	3:36:11 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:36:11 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:36:11 PM	Tube furnace set to 0
11/20/2012	3:36:12 PM	Run finished at 3:36 PM
11/20/2012	3:36:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	3:36:16 PM	Recipe started at 3:36 PM
11/20/2012	3:36:16 PM	Helium valve closed
11/20/2012	3:36:16 PM	H2 valve closed
11/20/2012	3:36:16 PM	BCl3 valve closed
11/20/2012	3:36:16 PM	PH3 valve closed
11/20/2012	3:36:16 PM	SiCl4 pre valve closed
11/20/2012	3:36:16 PM	SiCl4 post valve closed
11/20/2012	3:36:16 PM	Main Vac valve closed
11/20/2012	3:36:16 PM	Bypass valve closed
11/20/2012	3:36:16 PM	Bubbler valve closed
11/20/2012	3:36:16 PM	Helium MFC set to  0.000000
11/20/2012	3:36:16 PM	H2 MFC set to  0.000000
11/20/2012	3:36:16 PM	BCl3 MFC set to  0.000000
11/20/2012	3:36:16 PM	PH3 MFC set to  0.000000
11/20/2012	3:36:16 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:36:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:36:16 PM	Tube furnace set to 0
11/20/2012	3:36:19 PM	H2 valve closed
11/20/2012	3:36:19 PM	BCl3 valve closed
11/20/2012	3:36:19 PM	PH3 valve closed
11/20/2012	3:36:19 PM	SiCl4 pre valve closed
11/20/2012	3:36:19 PM	SiCl4 post valve closed
11/20/2012	3:36:19 PM	Main Vac valve closed
11/20/2012	3:36:19 PM	Bypass valve closed
11/20/2012	3:36:19 PM	Bubbler valve closed
11/20/2012	3:36:19 PM	Helium valve opened
11/20/2012	3:36:19 PM	Helium MFC set to  500.000000
11/20/2012	3:36:19 PM	H2 MFC set to  0.000000
11/20/2012	3:36:19 PM	BCl3 MFC set to  0.000000
11/20/2012	3:36:19 PM	PH3 MFC set to  0.000000
11/20/2012	3:36:19 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:36:19 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:36:19 PM	Tube furnace set to 0
11/20/2012	3:36:20 PM	Helium valve closed
11/20/2012	3:36:20 PM	H2 valve closed
11/20/2012	3:36:20 PM	BCl3 valve closed
11/20/2012	3:36:20 PM	PH3 valve closed
11/20/2012	3:36:20 PM	SiCl4 pre valve closed
11/20/2012	3:36:20 PM	SiCl4 post valve closed
11/20/2012	3:36:20 PM	Main Vac valve closed
11/20/2012	3:36:20 PM	Bypass valve closed
11/20/2012	3:36:20 PM	Bubbler valve closed
11/20/2012	3:36:20 PM	Helium MFC set to  0.000000
11/20/2012	3:36:20 PM	H2 MFC set to  0.000000
11/20/2012	3:36:20 PM	BCl3 MFC set to  0.000000
11/20/2012	3:36:20 PM	PH3 MFC set to  0.000000
11/20/2012	3:36:20 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:36:20 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:36:20 PM	Tube furnace set to 0
11/20/2012	3:36:21 PM	Run finished at 3:36 PM
11/20/2012	3:36:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	3:43:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	3:43:05 PM	Recipe started at 3:43 PM
11/20/2012	3:43:05 PM	Helium valve closed
11/20/2012	3:43:05 PM	H2 valve closed
11/20/2012	3:43:05 PM	BCl3 valve closed
11/20/2012	3:43:05 PM	PH3 valve closed
11/20/2012	3:43:05 PM	SiCl4 pre valve closed
11/20/2012	3:43:05 PM	SiCl4 post valve closed
11/20/2012	3:43:05 PM	Main Vac valve closed
11/20/2012	3:43:05 PM	Bubbler valve closed
11/20/2012	3:43:05 PM	Bypass valve opened
11/20/2012	3:43:05 PM	Helium MFC set to  0.000000
11/20/2012	3:43:05 PM	H2 MFC set to  0.000000
11/20/2012	3:43:05 PM	BCl3 MFC set to  0.000000
11/20/2012	3:43:05 PM	PH3 MFC set to  0.000000
11/20/2012	3:43:05 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:43:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:43:05 PM	Tube furnace set to 0
11/20/2012	3:44:19 PM	Helium valve closed
11/20/2012	3:44:19 PM	H2 valve closed
11/20/2012	3:44:19 PM	BCl3 valve closed
11/20/2012	3:44:19 PM	PH3 valve closed
11/20/2012	3:44:19 PM	SiCl4 pre valve closed
11/20/2012	3:44:19 PM	SiCl4 post valve closed
11/20/2012	3:44:19 PM	Main Vac valve closed
11/20/2012	3:44:19 PM	Bubbler valve closed
11/20/2012	3:44:19 PM	Bypass valve opened
11/20/2012	3:44:19 PM	Helium MFC set to  0.000000
11/20/2012	3:44:19 PM	H2 MFC set to  0.000000
11/20/2012	3:44:19 PM	BCl3 MFC set to  0.000000
11/20/2012	3:44:19 PM	PH3 MFC set to  0.000000
11/20/2012	3:44:19 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:44:19 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:44:19 PM	Tube furnace set to 0
11/20/2012	3:45:19 PM	Helium valve closed
11/20/2012	3:45:19 PM	H2 valve closed
11/20/2012	3:45:19 PM	BCl3 valve closed
11/20/2012	3:45:19 PM	PH3 valve closed
11/20/2012	3:45:19 PM	SiCl4 pre valve closed
11/20/2012	3:45:19 PM	SiCl4 post valve closed
11/20/2012	3:45:19 PM	Bypass valve closed
11/20/2012	3:45:19 PM	Bubbler valve closed
11/20/2012	3:45:19 PM	Main Vac valve opened
11/20/2012	3:45:19 PM	Helium MFC set to  0.000000
11/20/2012	3:45:19 PM	H2 MFC set to  0.000000
11/20/2012	3:45:19 PM	BCl3 MFC set to  0.000000
11/20/2012	3:45:19 PM	PH3 MFC set to  0.000000
11/20/2012	3:45:19 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:45:19 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:45:19 PM	Tube furnace set to 0
11/20/2012	3:45:20 PM	Run finished at 3:45 PM
11/20/2012	3:45:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	3:49:43 PM	Recipe started at 3:49 PM
11/20/2012	3:49:43 PM	Helium valve closed
11/20/2012	3:49:43 PM	H2 valve closed
11/20/2012	3:49:43 PM	BCl3 valve closed
11/20/2012	3:49:43 PM	PH3 valve closed
11/20/2012	3:49:43 PM	SiCl4 pre valve closed
11/20/2012	3:49:43 PM	SiCl4 post valve closed
11/20/2012	3:49:43 PM	Bypass valve closed
11/20/2012	3:49:43 PM	Bubbler valve closed
11/20/2012	3:49:43 PM	Main Vac valve opened
11/20/2012	3:49:43 PM	Helium MFC set to  0.000000
11/20/2012	3:49:43 PM	H2 MFC set to  0.000000
11/20/2012	3:49:43 PM	BCl3 MFC set to  0.000000
11/20/2012	3:49:43 PM	PH3 MFC set to  0.000000
11/20/2012	3:49:43 PM	SiCl4 MFC set to  0.000000
11/20/2012	3:49:43 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	3:49:43 PM	Tube furnace set to 150
11/20/2012	4:19:43 PM	H2 valve closed
11/20/2012	4:19:43 PM	BCl3 valve closed
11/20/2012	4:19:43 PM	PH3 valve closed
11/20/2012	4:19:43 PM	SiCl4 pre valve closed
11/20/2012	4:19:43 PM	SiCl4 post valve closed
11/20/2012	4:19:43 PM	Bypass valve closed
11/20/2012	4:19:43 PM	Bubbler valve closed
11/20/2012	4:19:43 PM	Helium valve opened
11/20/2012	4:19:43 PM	Main Vac valve opened
11/20/2012	4:19:43 PM	Helium MFC set to  20.000000
11/20/2012	4:19:43 PM	H2 MFC set to  0.000000
11/20/2012	4:19:43 PM	BCl3 MFC set to  0.000000
11/20/2012	4:19:43 PM	PH3 MFC set to  0.000000
11/20/2012	4:19:44 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:19:44 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:19:44 PM	Tube furnace set to 150
11/20/2012	4:20:14 PM	Helium valve closed
11/20/2012	4:20:14 PM	H2 valve closed
11/20/2012	4:20:14 PM	BCl3 valve closed
11/20/2012	4:20:14 PM	PH3 valve closed
11/20/2012	4:20:14 PM	SiCl4 pre valve closed
11/20/2012	4:20:14 PM	SiCl4 post valve closed
11/20/2012	4:20:14 PM	Bypass valve closed
11/20/2012	4:20:14 PM	Bubbler valve closed
11/20/2012	4:20:14 PM	Main Vac valve opened
11/20/2012	4:20:14 PM	Helium MFC set to  0.000000
11/20/2012	4:20:14 PM	H2 MFC set to  0.000000
11/20/2012	4:20:14 PM	BCl3 MFC set to  0.000000
11/20/2012	4:20:14 PM	PH3 MFC set to  0.000000
11/20/2012	4:20:14 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:20:14 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:20:14 PM	Tube furnace set to 150
11/20/2012	4:20:44 PM	H2 valve closed
11/20/2012	4:20:44 PM	BCl3 valve closed
11/20/2012	4:20:44 PM	PH3 valve closed
11/20/2012	4:20:44 PM	SiCl4 pre valve closed
11/20/2012	4:20:44 PM	SiCl4 post valve closed
11/20/2012	4:20:44 PM	Bypass valve closed
11/20/2012	4:20:44 PM	Bubbler valve closed
11/20/2012	4:20:44 PM	Helium valve opened
11/20/2012	4:20:44 PM	Main Vac valve opened
11/20/2012	4:20:44 PM	Helium MFC set to  20.000000
11/20/2012	4:20:44 PM	H2 MFC set to  0.000000
11/20/2012	4:20:44 PM	BCl3 MFC set to  0.000000
11/20/2012	4:20:44 PM	PH3 MFC set to  0.000000
11/20/2012	4:20:44 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:20:44 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:20:44 PM	Tube furnace set to 150
11/20/2012	4:21:14 PM	Helium valve closed
11/20/2012	4:21:14 PM	H2 valve closed
11/20/2012	4:21:14 PM	BCl3 valve closed
11/20/2012	4:21:14 PM	PH3 valve closed
11/20/2012	4:21:14 PM	SiCl4 pre valve closed
11/20/2012	4:21:14 PM	SiCl4 post valve closed
11/20/2012	4:21:14 PM	Bypass valve closed
11/20/2012	4:21:14 PM	Bubbler valve closed
11/20/2012	4:21:14 PM	Main Vac valve opened
11/20/2012	4:21:14 PM	Helium MFC set to  0.000000
11/20/2012	4:21:14 PM	H2 MFC set to  0.000000
11/20/2012	4:21:14 PM	BCl3 MFC set to  0.000000
11/20/2012	4:21:14 PM	PH3 MFC set to  0.000000
11/20/2012	4:21:14 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:21:14 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:21:14 PM	Tube furnace set to 150
11/20/2012	4:21:44 PM	H2 valve closed
11/20/2012	4:21:44 PM	BCl3 valve closed
11/20/2012	4:21:44 PM	PH3 valve closed
11/20/2012	4:21:44 PM	SiCl4 pre valve closed
11/20/2012	4:21:44 PM	SiCl4 post valve closed
11/20/2012	4:21:44 PM	Bypass valve closed
11/20/2012	4:21:44 PM	Bubbler valve closed
11/20/2012	4:21:44 PM	Helium valve opened
11/20/2012	4:21:44 PM	Main Vac valve opened
11/20/2012	4:21:44 PM	Helium MFC set to  20.000000
11/20/2012	4:21:44 PM	H2 MFC set to  0.000000
11/20/2012	4:21:44 PM	BCl3 MFC set to  0.000000
11/20/2012	4:21:44 PM	PH3 MFC set to  0.000000
11/20/2012	4:21:45 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:21:45 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:21:45 PM	Tube furnace set to 150
11/20/2012	4:22:15 PM	Helium valve closed
11/20/2012	4:22:15 PM	H2 valve closed
11/20/2012	4:22:15 PM	BCl3 valve closed
11/20/2012	4:22:15 PM	PH3 valve closed
11/20/2012	4:22:15 PM	SiCl4 pre valve closed
11/20/2012	4:22:15 PM	SiCl4 post valve closed
11/20/2012	4:22:15 PM	Bypass valve closed
11/20/2012	4:22:15 PM	Bubbler valve closed
11/20/2012	4:22:15 PM	Main Vac valve opened
11/20/2012	4:22:15 PM	Helium MFC set to  0.000000
11/20/2012	4:22:15 PM	H2 MFC set to  0.000000
11/20/2012	4:22:15 PM	BCl3 MFC set to  0.000000
11/20/2012	4:22:15 PM	PH3 MFC set to  0.000000
11/20/2012	4:22:15 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:22:15 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:22:15 PM	Tube furnace set to 150
11/20/2012	4:22:45 PM	H2 valve closed
11/20/2012	4:22:45 PM	BCl3 valve closed
11/20/2012	4:22:45 PM	PH3 valve closed
11/20/2012	4:22:45 PM	SiCl4 pre valve closed
11/20/2012	4:22:45 PM	SiCl4 post valve closed
11/20/2012	4:22:45 PM	Bypass valve closed
11/20/2012	4:22:45 PM	Bubbler valve closed
11/20/2012	4:22:45 PM	Helium valve opened
11/20/2012	4:22:45 PM	Main Vac valve opened
11/20/2012	4:22:45 PM	Helium MFC set to  20.000000
11/20/2012	4:22:45 PM	H2 MFC set to  0.000000
11/20/2012	4:22:45 PM	BCl3 MFC set to  0.000000
11/20/2012	4:22:45 PM	PH3 MFC set to  0.000000
11/20/2012	4:22:45 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:22:45 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:22:45 PM	Tube furnace set to 150
11/20/2012	4:23:15 PM	Helium valve closed
11/20/2012	4:23:15 PM	H2 valve closed
11/20/2012	4:23:15 PM	BCl3 valve closed
11/20/2012	4:23:15 PM	PH3 valve closed
11/20/2012	4:23:15 PM	SiCl4 pre valve closed
11/20/2012	4:23:15 PM	SiCl4 post valve closed
11/20/2012	4:23:15 PM	Bypass valve closed
11/20/2012	4:23:15 PM	Bubbler valve closed
11/20/2012	4:23:15 PM	Main Vac valve opened
11/20/2012	4:23:15 PM	Helium MFC set to  0.000000
11/20/2012	4:23:15 PM	H2 MFC set to  0.000000
11/20/2012	4:23:15 PM	BCl3 MFC set to  0.000000
11/20/2012	4:23:15 PM	PH3 MFC set to  0.000000
11/20/2012	4:23:15 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:23:15 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:23:15 PM	Tube furnace set to 150
11/20/2012	4:23:45 PM	H2 valve closed
11/20/2012	4:23:45 PM	BCl3 valve closed
11/20/2012	4:23:45 PM	PH3 valve closed
11/20/2012	4:23:45 PM	SiCl4 pre valve closed
11/20/2012	4:23:45 PM	SiCl4 post valve closed
11/20/2012	4:23:45 PM	Bypass valve closed
11/20/2012	4:23:45 PM	Bubbler valve closed
11/20/2012	4:23:45 PM	Helium valve opened
11/20/2012	4:23:45 PM	Main Vac valve opened
11/20/2012	4:23:45 PM	Helium MFC set to  20.000000
11/20/2012	4:23:45 PM	H2 MFC set to  0.000000
11/20/2012	4:23:45 PM	BCl3 MFC set to  0.000000
11/20/2012	4:23:45 PM	PH3 MFC set to  0.000000
11/20/2012	4:23:45 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:23:45 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:23:46 PM	Tube furnace set to 150
11/20/2012	4:24:16 PM	Helium valve closed
11/20/2012	4:24:16 PM	H2 valve closed
11/20/2012	4:24:16 PM	BCl3 valve closed
11/20/2012	4:24:16 PM	PH3 valve closed
11/20/2012	4:24:16 PM	SiCl4 pre valve closed
11/20/2012	4:24:16 PM	SiCl4 post valve closed
11/20/2012	4:24:16 PM	Bypass valve closed
11/20/2012	4:24:16 PM	Bubbler valve closed
11/20/2012	4:24:16 PM	Main Vac valve opened
11/20/2012	4:24:16 PM	Helium MFC set to  0.000000
11/20/2012	4:24:16 PM	H2 MFC set to  0.000000
11/20/2012	4:24:16 PM	BCl3 MFC set to  0.000000
11/20/2012	4:24:16 PM	PH3 MFC set to  0.000000
11/20/2012	4:24:16 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:24:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:24:16 PM	Tube furnace set to 150
11/20/2012	4:24:46 PM	H2 valve closed
11/20/2012	4:24:46 PM	BCl3 valve closed
11/20/2012	4:24:46 PM	PH3 valve closed
11/20/2012	4:24:46 PM	SiCl4 pre valve closed
11/20/2012	4:24:46 PM	SiCl4 post valve closed
11/20/2012	4:24:46 PM	Bypass valve closed
11/20/2012	4:24:46 PM	Bubbler valve closed
11/20/2012	4:24:46 PM	Helium valve opened
11/20/2012	4:24:46 PM	Main Vac valve opened
11/20/2012	4:24:46 PM	Helium MFC set to  20.000000
11/20/2012	4:24:46 PM	H2 MFC set to  0.000000
11/20/2012	4:24:46 PM	BCl3 MFC set to  0.000000
11/20/2012	4:24:46 PM	PH3 MFC set to  0.000000
11/20/2012	4:24:46 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:24:46 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:24:46 PM	Tube furnace set to 150
11/20/2012	4:25:16 PM	Helium valve closed
11/20/2012	4:25:16 PM	H2 valve closed
11/20/2012	4:25:16 PM	BCl3 valve closed
11/20/2012	4:25:16 PM	PH3 valve closed
11/20/2012	4:25:16 PM	SiCl4 pre valve closed
11/20/2012	4:25:16 PM	SiCl4 post valve closed
11/20/2012	4:25:16 PM	Bypass valve closed
11/20/2012	4:25:16 PM	Bubbler valve closed
11/20/2012	4:25:16 PM	Main Vac valve opened
11/20/2012	4:25:16 PM	Helium MFC set to  0.000000
11/20/2012	4:25:16 PM	H2 MFC set to  0.000000
11/20/2012	4:25:16 PM	BCl3 MFC set to  0.000000
11/20/2012	4:25:16 PM	PH3 MFC set to  0.000000
11/20/2012	4:25:16 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:25:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:25:16 PM	Tube furnace set to 150
11/20/2012	4:25:46 PM	H2 valve closed
11/20/2012	4:25:46 PM	BCl3 valve closed
11/20/2012	4:25:46 PM	PH3 valve closed
11/20/2012	4:25:46 PM	SiCl4 pre valve closed
11/20/2012	4:25:46 PM	SiCl4 post valve closed
11/20/2012	4:25:46 PM	Bypass valve closed
11/20/2012	4:25:46 PM	Bubbler valve closed
11/20/2012	4:25:46 PM	Helium valve opened
11/20/2012	4:25:46 PM	Main Vac valve opened
11/20/2012	4:25:46 PM	Helium MFC set to  20.000000
11/20/2012	4:25:46 PM	H2 MFC set to  0.000000
11/20/2012	4:25:46 PM	BCl3 MFC set to  0.000000
11/20/2012	4:25:46 PM	PH3 MFC set to  0.000000
11/20/2012	4:25:46 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:25:46 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:25:47 PM	Tube furnace set to 150
11/20/2012	4:26:17 PM	Helium valve closed
11/20/2012	4:26:17 PM	H2 valve closed
11/20/2012	4:26:17 PM	BCl3 valve closed
11/20/2012	4:26:17 PM	PH3 valve closed
11/20/2012	4:26:17 PM	SiCl4 pre valve closed
11/20/2012	4:26:17 PM	SiCl4 post valve closed
11/20/2012	4:26:17 PM	Bypass valve closed
11/20/2012	4:26:17 PM	Bubbler valve closed
11/20/2012	4:26:17 PM	Main Vac valve opened
11/20/2012	4:26:17 PM	Helium MFC set to  0.000000
11/20/2012	4:26:17 PM	H2 MFC set to  0.000000
11/20/2012	4:26:17 PM	BCl3 MFC set to  0.000000
11/20/2012	4:26:17 PM	PH3 MFC set to  0.000000
11/20/2012	4:26:17 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:26:17 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:26:17 PM	Tube furnace set to 150
11/20/2012	4:26:47 PM	H2 valve closed
11/20/2012	4:26:47 PM	BCl3 valve closed
11/20/2012	4:26:47 PM	PH3 valve closed
11/20/2012	4:26:47 PM	SiCl4 pre valve closed
11/20/2012	4:26:47 PM	SiCl4 post valve closed
11/20/2012	4:26:47 PM	Bypass valve closed
11/20/2012	4:26:47 PM	Bubbler valve closed
11/20/2012	4:26:47 PM	Helium valve opened
11/20/2012	4:26:47 PM	Main Vac valve opened
11/20/2012	4:26:47 PM	Helium MFC set to  20.000000
11/20/2012	4:26:47 PM	H2 MFC set to  0.000000
11/20/2012	4:26:47 PM	BCl3 MFC set to  0.000000
11/20/2012	4:26:47 PM	PH3 MFC set to  0.000000
11/20/2012	4:26:47 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:26:47 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:26:47 PM	Tube furnace set to 150
11/20/2012	4:27:17 PM	Helium valve closed
11/20/2012	4:27:17 PM	H2 valve closed
11/20/2012	4:27:17 PM	BCl3 valve closed
11/20/2012	4:27:17 PM	PH3 valve closed
11/20/2012	4:27:17 PM	SiCl4 pre valve closed
11/20/2012	4:27:17 PM	SiCl4 post valve closed
11/20/2012	4:27:17 PM	Bypass valve closed
11/20/2012	4:27:17 PM	Bubbler valve closed
11/20/2012	4:27:17 PM	Main Vac valve opened
11/20/2012	4:27:17 PM	Helium MFC set to  0.000000
11/20/2012	4:27:17 PM	H2 MFC set to  0.000000
11/20/2012	4:27:17 PM	BCl3 MFC set to  0.000000
11/20/2012	4:27:17 PM	PH3 MFC set to  0.000000
11/20/2012	4:27:17 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:27:17 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:27:17 PM	Tube furnace set to 150
11/20/2012	4:27:47 PM	H2 valve closed
11/20/2012	4:27:47 PM	BCl3 valve closed
11/20/2012	4:27:47 PM	PH3 valve closed
11/20/2012	4:27:47 PM	SiCl4 pre valve closed
11/20/2012	4:27:47 PM	SiCl4 post valve closed
11/20/2012	4:27:47 PM	Bypass valve closed
11/20/2012	4:27:47 PM	Bubbler valve closed
11/20/2012	4:27:47 PM	Helium valve opened
11/20/2012	4:27:47 PM	Main Vac valve opened
11/20/2012	4:27:47 PM	Helium MFC set to  20.000000
11/20/2012	4:27:47 PM	H2 MFC set to  0.000000
11/20/2012	4:27:47 PM	BCl3 MFC set to  0.000000
11/20/2012	4:27:47 PM	PH3 MFC set to  0.000000
11/20/2012	4:27:47 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:27:47 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:27:48 PM	Tube furnace set to 150
11/20/2012	4:28:18 PM	Helium valve closed
11/20/2012	4:28:18 PM	H2 valve closed
11/20/2012	4:28:18 PM	BCl3 valve closed
11/20/2012	4:28:18 PM	PH3 valve closed
11/20/2012	4:28:18 PM	SiCl4 pre valve closed
11/20/2012	4:28:18 PM	SiCl4 post valve closed
11/20/2012	4:28:18 PM	Bypass valve closed
11/20/2012	4:28:18 PM	Bubbler valve closed
11/20/2012	4:28:18 PM	Main Vac valve opened
11/20/2012	4:28:18 PM	Helium MFC set to  0.000000
11/20/2012	4:28:18 PM	H2 MFC set to  0.000000
11/20/2012	4:28:18 PM	BCl3 MFC set to  0.000000
11/20/2012	4:28:18 PM	PH3 MFC set to  0.000000
11/20/2012	4:28:18 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:28:18 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:28:18 PM	Tube furnace set to 150
11/20/2012	4:28:48 PM	H2 valve closed
11/20/2012	4:28:48 PM	BCl3 valve closed
11/20/2012	4:28:48 PM	PH3 valve closed
11/20/2012	4:28:48 PM	SiCl4 pre valve closed
11/20/2012	4:28:48 PM	SiCl4 post valve closed
11/20/2012	4:28:48 PM	Bypass valve closed
11/20/2012	4:28:48 PM	Bubbler valve closed
11/20/2012	4:28:48 PM	Helium valve opened
11/20/2012	4:28:48 PM	Main Vac valve opened
11/20/2012	4:28:48 PM	Helium MFC set to  20.000000
11/20/2012	4:28:48 PM	H2 MFC set to  0.000000
11/20/2012	4:28:48 PM	BCl3 MFC set to  0.000000
11/20/2012	4:28:48 PM	PH3 MFC set to  0.000000
11/20/2012	4:28:48 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:28:48 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:28:48 PM	Tube furnace set to 150
11/20/2012	4:29:18 PM	Helium valve closed
11/20/2012	4:29:18 PM	H2 valve closed
11/20/2012	4:29:18 PM	BCl3 valve closed
11/20/2012	4:29:18 PM	PH3 valve closed
11/20/2012	4:29:18 PM	SiCl4 pre valve closed
11/20/2012	4:29:18 PM	SiCl4 post valve closed
11/20/2012	4:29:18 PM	Bypass valve closed
11/20/2012	4:29:18 PM	Bubbler valve closed
11/20/2012	4:29:18 PM	Main Vac valve opened
11/20/2012	4:29:18 PM	Helium MFC set to  0.000000
11/20/2012	4:29:18 PM	H2 MFC set to  0.000000
11/20/2012	4:29:18 PM	BCl3 MFC set to  0.000000
11/20/2012	4:29:18 PM	PH3 MFC set to  0.000000
11/20/2012	4:29:18 PM	SiCl4 MFC set to  0.000000
11/20/2012	4:29:18 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	4:29:18 PM	Tube furnace set to 150
11/20/2012	4:29:19 PM	Run finished at 4:29 PM
11/20/2012	5:14:46 PM	Recipe started at 5:14 PM
11/20/2012	5:14:46 PM	Helium valve closed
11/20/2012	5:14:46 PM	H2 valve closed
11/20/2012	5:14:46 PM	BCl3 valve closed
11/20/2012	5:14:46 PM	PH3 valve closed
11/20/2012	5:14:46 PM	SiCl4 pre valve closed
11/20/2012	5:14:46 PM	SiCl4 post valve closed
11/20/2012	5:14:46 PM	Main Vac valve closed
11/20/2012	5:14:46 PM	Bypass valve closed
11/20/2012	5:14:46 PM	Bubbler valve closed
11/20/2012	5:14:46 PM	Helium MFC set to  0.000000
11/20/2012	5:14:46 PM	H2 MFC set to  0.000000
11/20/2012	5:14:46 PM	BCl3 MFC set to  0.000000
11/20/2012	5:14:46 PM	PH3 MFC set to  0.000000
11/20/2012	5:14:46 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:14:46 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:14:46 PM	Tube furnace set to 0
11/20/2012	5:14:49 PM	Helium valve closed
11/20/2012	5:14:49 PM	BCl3 valve closed
11/20/2012	5:14:49 PM	PH3 valve closed
11/20/2012	5:14:49 PM	SiCl4 pre valve closed
11/20/2012	5:14:49 PM	SiCl4 post valve closed
11/20/2012	5:14:49 PM	Main Vac valve closed
11/20/2012	5:14:49 PM	Bypass valve closed
11/20/2012	5:14:49 PM	Bubbler valve closed
11/20/2012	5:14:49 PM	H2 valve opened
11/20/2012	5:14:49 PM	Helium MFC set to  0.000000
11/20/2012	5:14:49 PM	H2 MFC set to  500.000000
11/20/2012	5:14:49 PM	BCl3 MFC set to  0.000000
11/20/2012	5:14:49 PM	PH3 MFC set to  0.000000
11/20/2012	5:14:49 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:14:49 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:14:49 PM	Tube furnace set to 0
11/20/2012	5:16:02 PM	Helium valve closed
11/20/2012	5:16:02 PM	BCl3 valve closed
11/20/2012	5:16:02 PM	PH3 valve closed
11/20/2012	5:16:02 PM	SiCl4 pre valve closed
11/20/2012	5:16:02 PM	SiCl4 post valve closed
11/20/2012	5:16:02 PM	Main Vac valve closed
11/20/2012	5:16:02 PM	Bypass valve closed
11/20/2012	5:16:02 PM	H2 valve opened
11/20/2012	5:16:02 PM	Bubbler valve opened
11/20/2012	5:16:02 PM	Helium MFC set to  0.000000
11/20/2012	5:16:02 PM	H2 MFC set to  500.000000
11/20/2012	5:16:02 PM	BCl3 MFC set to  0.000000
11/20/2012	5:16:02 PM	PH3 MFC set to  0.000000
11/20/2012	5:16:02 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:16:02 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:16:02 PM	Tube furnace set to 0
11/20/2012	5:16:03 PM	Helium valve closed
11/20/2012	5:16:03 PM	BCl3 valve closed
11/20/2012	5:16:03 PM	PH3 valve closed
11/20/2012	5:16:03 PM	SiCl4 pre valve closed
11/20/2012	5:16:03 PM	SiCl4 post valve closed
11/20/2012	5:16:03 PM	Main Vac valve closed
11/20/2012	5:16:03 PM	Bypass valve closed
11/20/2012	5:16:03 PM	H2 valve opened
11/20/2012	5:16:03 PM	Bubbler valve opened
11/20/2012	5:16:03 PM	Helium MFC set to  0.000000
11/20/2012	5:16:03 PM	H2 MFC set to  450.000000
11/20/2012	5:16:03 PM	BCl3 MFC set to  0.000000
11/20/2012	5:16:03 PM	PH3 MFC set to  0.000000
11/20/2012	5:16:03 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:16:03 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:16:03 PM	Tube furnace set to 1000
11/20/2012	5:41:03 PM	Helium valve closed
11/20/2012	5:41:03 PM	PH3 valve closed
11/20/2012	5:41:03 PM	Main Vac valve closed
11/20/2012	5:41:03 PM	Bypass valve closed
11/20/2012	5:41:03 PM	H2 valve opened
11/20/2012	5:41:03 PM	BCl3 valve opened
11/20/2012	5:41:03 PM	SiCl4 pre valve opened
11/20/2012	5:41:03 PM	SiCl4 post valve opened
11/20/2012	5:41:03 PM	Bubbler valve opened
11/20/2012	5:41:03 PM	Helium MFC set to  0.000000
11/20/2012	5:41:03 PM	H2 MFC set to  450.000000
11/20/2012	5:41:03 PM	BCl3 MFC set to  1.500000
11/20/2012	5:41:03 PM	PH3 MFC set to  0.000000
11/20/2012	5:41:03 PM	SiCl4 MFC set to  50.000000
11/20/2012	5:41:03 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:41:03 PM	Tube furnace set to 1000
11/20/2012	5:46:03 PM	Helium valve closed
11/20/2012	5:46:03 PM	BCl3 valve closed
11/20/2012	5:46:03 PM	PH3 valve closed
11/20/2012	5:46:03 PM	SiCl4 pre valve closed
11/20/2012	5:46:03 PM	SiCl4 post valve closed
11/20/2012	5:46:03 PM	Main Vac valve closed
11/20/2012	5:46:03 PM	Bypass valve closed
11/20/2012	5:46:03 PM	H2 valve opened
11/20/2012	5:46:03 PM	Bubbler valve opened
11/20/2012	5:46:03 PM	Helium MFC set to  0.000000
11/20/2012	5:46:03 PM	H2 MFC set to  500.000000
11/20/2012	5:46:03 PM	BCl3 MFC set to  0.000000
11/20/2012	5:46:03 PM	PH3 MFC set to  0.000000
11/20/2012	5:46:03 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:46:03 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:46:03 PM	Tube furnace set to 750
11/20/2012	5:51:04 PM	H2 valve closed
11/20/2012	5:51:04 PM	BCl3 valve closed
11/20/2012	5:51:04 PM	PH3 valve closed
11/20/2012	5:51:04 PM	SiCl4 pre valve closed
11/20/2012	5:51:04 PM	SiCl4 post valve closed
11/20/2012	5:51:04 PM	Main Vac valve closed
11/20/2012	5:51:04 PM	Bypass valve closed
11/20/2012	5:51:04 PM	Helium valve opened
11/20/2012	5:51:04 PM	Bubbler valve opened
11/20/2012	5:51:04 PM	Helium MFC set to  500.000000
11/20/2012	5:51:04 PM	H2 MFC set to  0.000000
11/20/2012	5:51:04 PM	BCl3 MFC set to  0.000000
11/20/2012	5:51:04 PM	PH3 MFC set to  0.000000
11/20/2012	5:51:04 PM	SiCl4 MFC set to  0.000000
11/20/2012	5:51:04 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	5:51:04 PM	Tube furnace set to 0
11/20/2012	6:11:04 PM	Helium valve closed
11/20/2012	6:11:04 PM	H2 valve closed
11/20/2012	6:11:04 PM	BCl3 valve closed
11/20/2012	6:11:04 PM	PH3 valve closed
11/20/2012	6:11:04 PM	SiCl4 pre valve closed
11/20/2012	6:11:04 PM	SiCl4 post valve closed
11/20/2012	6:11:04 PM	Main Vac valve closed
11/20/2012	6:11:04 PM	Bypass valve closed
11/20/2012	6:11:04 PM	Bubbler valve closed
11/20/2012	6:11:04 PM	Helium MFC set to  0.000000
11/20/2012	6:11:04 PM	H2 MFC set to  0.000000
11/20/2012	6:11:04 PM	BCl3 MFC set to  0.000000
11/20/2012	6:11:04 PM	PH3 MFC set to  0.000000
11/20/2012	6:11:04 PM	SiCl4 MFC set to  0.000000
11/20/2012	6:11:04 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	6:11:04 PM	Tube furnace set to 0
11/20/2012	6:11:05 PM	Run finished at 6:11 PM
11/20/2012	7:16:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	7:16:46 PM	Recipe started at 7:16 PM
11/20/2012	7:16:46 PM	Helium valve closed
11/20/2012	7:16:46 PM	H2 valve closed
11/20/2012	7:16:46 PM	BCl3 valve closed
11/20/2012	7:16:46 PM	PH3 valve closed
11/20/2012	7:16:46 PM	SiCl4 pre valve closed
11/20/2012	7:16:46 PM	SiCl4 post valve closed
11/20/2012	7:16:46 PM	Main Vac valve closed
11/20/2012	7:16:46 PM	Bypass valve closed
11/20/2012	7:16:46 PM	Bubbler valve closed
11/20/2012	7:16:46 PM	Helium MFC set to  0.000000
11/20/2012	7:16:46 PM	H2 MFC set to  0.000000
11/20/2012	7:16:46 PM	BCl3 MFC set to  0.000000
11/20/2012	7:16:46 PM	PH3 MFC set to  0.000000
11/20/2012	7:16:46 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:16:46 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:16:46 PM	Tube furnace set to 0
11/20/2012	7:16:49 PM	H2 valve closed
11/20/2012	7:16:49 PM	BCl3 valve closed
11/20/2012	7:16:49 PM	PH3 valve closed
11/20/2012	7:16:49 PM	SiCl4 pre valve closed
11/20/2012	7:16:49 PM	SiCl4 post valve closed
11/20/2012	7:16:49 PM	Main Vac valve closed
11/20/2012	7:16:49 PM	Bypass valve closed
11/20/2012	7:16:49 PM	Bubbler valve closed
11/20/2012	7:16:49 PM	Helium valve opened
11/20/2012	7:16:49 PM	Helium MFC set to  500.000000
11/20/2012	7:16:49 PM	H2 MFC set to  0.000000
11/20/2012	7:16:49 PM	BCl3 MFC set to  0.000000
11/20/2012	7:16:49 PM	PH3 MFC set to  0.000000
11/20/2012	7:16:49 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:16:49 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:16:49 PM	Tube furnace set to 0
11/20/2012	7:16:52 PM	Helium valve closed
11/20/2012	7:16:52 PM	H2 valve closed
11/20/2012	7:16:52 PM	BCl3 valve closed
11/20/2012	7:16:52 PM	PH3 valve closed
11/20/2012	7:16:52 PM	SiCl4 pre valve closed
11/20/2012	7:16:52 PM	SiCl4 post valve closed
11/20/2012	7:16:52 PM	Main Vac valve closed
11/20/2012	7:16:52 PM	Bypass valve closed
11/20/2012	7:16:52 PM	Bubbler valve closed
11/20/2012	7:16:52 PM	Helium MFC set to  0.000000
11/20/2012	7:16:52 PM	H2 MFC set to  0.000000
11/20/2012	7:16:52 PM	BCl3 MFC set to  0.000000
11/20/2012	7:16:52 PM	PH3 MFC set to  0.000000
11/20/2012	7:16:52 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:16:52 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:16:53 PM	Tube furnace set to 0
11/20/2012	7:16:54 PM	Run finished at 7:16 PM
11/20/2012	7:16:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	7:24:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	7:24:27 PM	Recipe started at 7:24 PM
11/20/2012	7:24:27 PM	Helium valve closed
11/20/2012	7:24:27 PM	H2 valve closed
11/20/2012	7:24:27 PM	BCl3 valve closed
11/20/2012	7:24:27 PM	PH3 valve closed
11/20/2012	7:24:27 PM	SiCl4 pre valve closed
11/20/2012	7:24:27 PM	SiCl4 post valve closed
11/20/2012	7:24:27 PM	Main Vac valve closed
11/20/2012	7:24:27 PM	Bubbler valve closed
11/20/2012	7:24:27 PM	Bypass valve opened
11/20/2012	7:24:27 PM	Helium MFC set to  0.000000
11/20/2012	7:24:27 PM	H2 MFC set to  0.000000
11/20/2012	7:24:27 PM	BCl3 MFC set to  0.000000
11/20/2012	7:24:27 PM	PH3 MFC set to  0.000000
11/20/2012	7:24:27 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:24:27 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:24:27 PM	Tube furnace set to 0
11/20/2012	7:25:42 PM	Helium valve closed
11/20/2012	7:25:42 PM	H2 valve closed
11/20/2012	7:25:42 PM	BCl3 valve closed
11/20/2012	7:25:42 PM	PH3 valve closed
11/20/2012	7:25:42 PM	SiCl4 pre valve closed
11/20/2012	7:25:42 PM	SiCl4 post valve closed
11/20/2012	7:25:42 PM	Main Vac valve closed
11/20/2012	7:25:42 PM	Bubbler valve closed
11/20/2012	7:25:42 PM	Bypass valve opened
11/20/2012	7:25:42 PM	Helium MFC set to  0.000000
11/20/2012	7:25:42 PM	H2 MFC set to  0.000000
11/20/2012	7:25:42 PM	BCl3 MFC set to  0.000000
11/20/2012	7:25:42 PM	PH3 MFC set to  0.000000
11/20/2012	7:25:42 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:25:42 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:25:42 PM	Tube furnace set to 0
11/20/2012	7:26:42 PM	Helium valve closed
11/20/2012	7:26:42 PM	H2 valve closed
11/20/2012	7:26:42 PM	BCl3 valve closed
11/20/2012	7:26:42 PM	PH3 valve closed
11/20/2012	7:26:42 PM	SiCl4 pre valve closed
11/20/2012	7:26:42 PM	SiCl4 post valve closed
11/20/2012	7:26:42 PM	Bypass valve closed
11/20/2012	7:26:42 PM	Bubbler valve closed
11/20/2012	7:26:42 PM	Main Vac valve opened
11/20/2012	7:26:42 PM	Helium MFC set to  0.000000
11/20/2012	7:26:42 PM	H2 MFC set to  0.000000
11/20/2012	7:26:42 PM	BCl3 MFC set to  0.000000
11/20/2012	7:26:42 PM	PH3 MFC set to  0.000000
11/20/2012	7:26:42 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:26:42 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:26:43 PM	Tube furnace set to 0
11/20/2012	7:26:44 PM	Run finished at 7:26 PM
11/20/2012	7:26:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	7:27:05 PM	Recipe started at 7:27 PM
11/20/2012	7:27:05 PM	Helium valve closed
11/20/2012	7:27:05 PM	H2 valve closed
11/20/2012	7:27:05 PM	BCl3 valve closed
11/20/2012	7:27:05 PM	PH3 valve closed
11/20/2012	7:27:05 PM	SiCl4 pre valve closed
11/20/2012	7:27:05 PM	SiCl4 post valve closed
11/20/2012	7:27:05 PM	Bypass valve closed
11/20/2012	7:27:05 PM	Bubbler valve closed
11/20/2012	7:27:05 PM	Main Vac valve opened
11/20/2012	7:27:05 PM	Helium MFC set to  0.000000
11/20/2012	7:27:05 PM	H2 MFC set to  0.000000
11/20/2012	7:27:05 PM	BCl3 MFC set to  0.000000
11/20/2012	7:27:05 PM	PH3 MFC set to  0.000000
11/20/2012	7:27:05 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:27:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:27:05 PM	Tube furnace set to 150
11/20/2012	7:57:05 PM	H2 valve closed
11/20/2012	7:57:05 PM	BCl3 valve closed
11/20/2012	7:57:05 PM	PH3 valve closed
11/20/2012	7:57:05 PM	SiCl4 pre valve closed
11/20/2012	7:57:05 PM	SiCl4 post valve closed
11/20/2012	7:57:05 PM	Bypass valve closed
11/20/2012	7:57:05 PM	Bubbler valve closed
11/20/2012	7:57:06 PM	Helium valve opened
11/20/2012	7:57:06 PM	Main Vac valve opened
11/20/2012	7:57:06 PM	Helium MFC set to  20.000000
11/20/2012	7:57:06 PM	H2 MFC set to  0.000000
11/20/2012	7:57:06 PM	BCl3 MFC set to  0.000000
11/20/2012	7:57:06 PM	PH3 MFC set to  0.000000
11/20/2012	7:57:06 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:57:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:57:06 PM	Tube furnace set to 150
11/20/2012	7:57:36 PM	Helium valve closed
11/20/2012	7:57:36 PM	H2 valve closed
11/20/2012	7:57:36 PM	BCl3 valve closed
11/20/2012	7:57:36 PM	PH3 valve closed
11/20/2012	7:57:36 PM	SiCl4 pre valve closed
11/20/2012	7:57:36 PM	SiCl4 post valve closed
11/20/2012	7:57:36 PM	Bypass valve closed
11/20/2012	7:57:36 PM	Bubbler valve closed
11/20/2012	7:57:36 PM	Main Vac valve opened
11/20/2012	7:57:36 PM	Helium MFC set to  0.000000
11/20/2012	7:57:36 PM	H2 MFC set to  0.000000
11/20/2012	7:57:36 PM	BCl3 MFC set to  0.000000
11/20/2012	7:57:36 PM	PH3 MFC set to  0.000000
11/20/2012	7:57:36 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:57:36 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:57:36 PM	Tube furnace set to 150
11/20/2012	7:58:06 PM	H2 valve closed
11/20/2012	7:58:06 PM	BCl3 valve closed
11/20/2012	7:58:06 PM	PH3 valve closed
11/20/2012	7:58:06 PM	SiCl4 pre valve closed
11/20/2012	7:58:06 PM	SiCl4 post valve closed
11/20/2012	7:58:06 PM	Bypass valve closed
11/20/2012	7:58:06 PM	Bubbler valve closed
11/20/2012	7:58:06 PM	Helium valve opened
11/20/2012	7:58:06 PM	Main Vac valve opened
11/20/2012	7:58:06 PM	Helium MFC set to  20.000000
11/20/2012	7:58:06 PM	H2 MFC set to  0.000000
11/20/2012	7:58:06 PM	BCl3 MFC set to  0.000000
11/20/2012	7:58:06 PM	PH3 MFC set to  0.000000
11/20/2012	7:58:06 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:58:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:58:06 PM	Tube furnace set to 150
11/20/2012	7:58:36 PM	Helium valve closed
11/20/2012	7:58:36 PM	H2 valve closed
11/20/2012	7:58:36 PM	BCl3 valve closed
11/20/2012	7:58:36 PM	PH3 valve closed
11/20/2012	7:58:36 PM	SiCl4 pre valve closed
11/20/2012	7:58:36 PM	SiCl4 post valve closed
11/20/2012	7:58:36 PM	Bypass valve closed
11/20/2012	7:58:36 PM	Bubbler valve closed
11/20/2012	7:58:36 PM	Main Vac valve opened
11/20/2012	7:58:36 PM	Helium MFC set to  0.000000
11/20/2012	7:58:36 PM	H2 MFC set to  0.000000
11/20/2012	7:58:36 PM	BCl3 MFC set to  0.000000
11/20/2012	7:58:36 PM	PH3 MFC set to  0.000000
11/20/2012	7:58:36 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:58:36 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:58:36 PM	Tube furnace set to 150
11/20/2012	7:59:06 PM	H2 valve closed
11/20/2012	7:59:06 PM	BCl3 valve closed
11/20/2012	7:59:06 PM	PH3 valve closed
11/20/2012	7:59:06 PM	SiCl4 pre valve closed
11/20/2012	7:59:06 PM	SiCl4 post valve closed
11/20/2012	7:59:06 PM	Bypass valve closed
11/20/2012	7:59:06 PM	Bubbler valve closed
11/20/2012	7:59:06 PM	Helium valve opened
11/20/2012	7:59:07 PM	Main Vac valve opened
11/20/2012	7:59:07 PM	Helium MFC set to  20.000000
11/20/2012	7:59:07 PM	H2 MFC set to  0.000000
11/20/2012	7:59:07 PM	BCl3 MFC set to  0.000000
11/20/2012	7:59:07 PM	PH3 MFC set to  0.000000
11/20/2012	7:59:07 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:59:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:59:07 PM	Tube furnace set to 150
11/20/2012	7:59:37 PM	Helium valve closed
11/20/2012	7:59:37 PM	H2 valve closed
11/20/2012	7:59:37 PM	BCl3 valve closed
11/20/2012	7:59:37 PM	PH3 valve closed
11/20/2012	7:59:37 PM	SiCl4 pre valve closed
11/20/2012	7:59:37 PM	SiCl4 post valve closed
11/20/2012	7:59:37 PM	Bypass valve closed
11/20/2012	7:59:37 PM	Bubbler valve closed
11/20/2012	7:59:37 PM	Main Vac valve opened
11/20/2012	7:59:37 PM	Helium MFC set to  0.000000
11/20/2012	7:59:37 PM	H2 MFC set to  0.000000
11/20/2012	7:59:37 PM	BCl3 MFC set to  0.000000
11/20/2012	7:59:37 PM	PH3 MFC set to  0.000000
11/20/2012	7:59:37 PM	SiCl4 MFC set to  0.000000
11/20/2012	7:59:37 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	7:59:37 PM	Tube furnace set to 150
11/20/2012	8:00:07 PM	H2 valve closed
11/20/2012	8:00:07 PM	BCl3 valve closed
11/20/2012	8:00:07 PM	PH3 valve closed
11/20/2012	8:00:07 PM	SiCl4 pre valve closed
11/20/2012	8:00:07 PM	SiCl4 post valve closed
11/20/2012	8:00:07 PM	Bypass valve closed
11/20/2012	8:00:07 PM	Bubbler valve closed
11/20/2012	8:00:07 PM	Helium valve opened
11/20/2012	8:00:07 PM	Main Vac valve opened
11/20/2012	8:00:07 PM	Helium MFC set to  20.000000
11/20/2012	8:00:07 PM	H2 MFC set to  0.000000
11/20/2012	8:00:07 PM	BCl3 MFC set to  0.000000
11/20/2012	8:00:07 PM	PH3 MFC set to  0.000000
11/20/2012	8:00:07 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:00:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:00:07 PM	Tube furnace set to 150
11/20/2012	8:00:37 PM	Helium valve closed
11/20/2012	8:00:37 PM	H2 valve closed
11/20/2012	8:00:37 PM	BCl3 valve closed
11/20/2012	8:00:37 PM	PH3 valve closed
11/20/2012	8:00:37 PM	SiCl4 pre valve closed
11/20/2012	8:00:37 PM	SiCl4 post valve closed
11/20/2012	8:00:37 PM	Bypass valve closed
11/20/2012	8:00:37 PM	Bubbler valve closed
11/20/2012	8:00:37 PM	Main Vac valve opened
11/20/2012	8:00:37 PM	Helium MFC set to  0.000000
11/20/2012	8:00:37 PM	H2 MFC set to  0.000000
11/20/2012	8:00:37 PM	BCl3 MFC set to  0.000000
11/20/2012	8:00:37 PM	PH3 MFC set to  0.000000
11/20/2012	8:00:37 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:00:37 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:00:37 PM	Tube furnace set to 150
11/20/2012	8:01:07 PM	H2 valve closed
11/20/2012	8:01:07 PM	BCl3 valve closed
11/20/2012	8:01:07 PM	PH3 valve closed
11/20/2012	8:01:07 PM	SiCl4 pre valve closed
11/20/2012	8:01:07 PM	SiCl4 post valve closed
11/20/2012	8:01:07 PM	Bypass valve closed
11/20/2012	8:01:07 PM	Bubbler valve closed
11/20/2012	8:01:07 PM	Helium valve opened
11/20/2012	8:01:07 PM	Main Vac valve opened
11/20/2012	8:01:07 PM	Helium MFC set to  20.000000
11/20/2012	8:01:07 PM	H2 MFC set to  0.000000
11/20/2012	8:01:07 PM	BCl3 MFC set to  0.000000
11/20/2012	8:01:08 PM	PH3 MFC set to  0.000000
11/20/2012	8:01:08 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:01:08 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:01:08 PM	Tube furnace set to 150
11/20/2012	8:01:38 PM	Helium valve closed
11/20/2012	8:01:38 PM	H2 valve closed
11/20/2012	8:01:38 PM	BCl3 valve closed
11/20/2012	8:01:38 PM	PH3 valve closed
11/20/2012	8:01:38 PM	SiCl4 pre valve closed
11/20/2012	8:01:38 PM	SiCl4 post valve closed
11/20/2012	8:01:38 PM	Bypass valve closed
11/20/2012	8:01:38 PM	Bubbler valve closed
11/20/2012	8:01:38 PM	Main Vac valve opened
11/20/2012	8:01:38 PM	Helium MFC set to  0.000000
11/20/2012	8:01:38 PM	H2 MFC set to  0.000000
11/20/2012	8:01:38 PM	BCl3 MFC set to  0.000000
11/20/2012	8:01:38 PM	PH3 MFC set to  0.000000
11/20/2012	8:01:38 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:01:38 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:01:38 PM	Tube furnace set to 150
11/20/2012	8:02:08 PM	H2 valve closed
11/20/2012	8:02:08 PM	BCl3 valve closed
11/20/2012	8:02:08 PM	PH3 valve closed
11/20/2012	8:02:08 PM	SiCl4 pre valve closed
11/20/2012	8:02:08 PM	SiCl4 post valve closed
11/20/2012	8:02:08 PM	Bypass valve closed
11/20/2012	8:02:08 PM	Bubbler valve closed
11/20/2012	8:02:08 PM	Helium valve opened
11/20/2012	8:02:08 PM	Main Vac valve opened
11/20/2012	8:02:08 PM	Helium MFC set to  20.000000
11/20/2012	8:02:08 PM	H2 MFC set to  0.000000
11/20/2012	8:02:08 PM	BCl3 MFC set to  0.000000
11/20/2012	8:02:08 PM	PH3 MFC set to  0.000000
11/20/2012	8:02:08 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:02:08 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:02:08 PM	Tube furnace set to 150
11/20/2012	8:02:38 PM	Helium valve closed
11/20/2012	8:02:38 PM	H2 valve closed
11/20/2012	8:02:38 PM	BCl3 valve closed
11/20/2012	8:02:38 PM	PH3 valve closed
11/20/2012	8:02:38 PM	SiCl4 pre valve closed
11/20/2012	8:02:38 PM	SiCl4 post valve closed
11/20/2012	8:02:38 PM	Bypass valve closed
11/20/2012	8:02:38 PM	Bubbler valve closed
11/20/2012	8:02:38 PM	Main Vac valve opened
11/20/2012	8:02:38 PM	Helium MFC set to  0.000000
11/20/2012	8:02:38 PM	H2 MFC set to  0.000000
11/20/2012	8:02:38 PM	BCl3 MFC set to  0.000000
11/20/2012	8:02:38 PM	PH3 MFC set to  0.000000
11/20/2012	8:02:38 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:02:38 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:02:38 PM	Tube furnace set to 150
11/20/2012	8:03:08 PM	H2 valve closed
11/20/2012	8:03:08 PM	BCl3 valve closed
11/20/2012	8:03:08 PM	PH3 valve closed
11/20/2012	8:03:08 PM	SiCl4 pre valve closed
11/20/2012	8:03:08 PM	SiCl4 post valve closed
11/20/2012	8:03:08 PM	Bypass valve closed
11/20/2012	8:03:08 PM	Bubbler valve closed
11/20/2012	8:03:08 PM	Helium valve opened
11/20/2012	8:03:08 PM	Main Vac valve opened
11/20/2012	8:03:08 PM	Helium MFC set to  20.000000
11/20/2012	8:03:08 PM	H2 MFC set to  0.000000
11/20/2012	8:03:08 PM	BCl3 MFC set to  0.000000
11/20/2012	8:03:08 PM	PH3 MFC set to  0.000000
11/20/2012	8:03:08 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:03:08 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:03:09 PM	Tube furnace set to 150
11/20/2012	8:03:39 PM	Helium valve closed
11/20/2012	8:03:39 PM	H2 valve closed
11/20/2012	8:03:39 PM	BCl3 valve closed
11/20/2012	8:03:39 PM	PH3 valve closed
11/20/2012	8:03:39 PM	SiCl4 pre valve closed
11/20/2012	8:03:39 PM	SiCl4 post valve closed
11/20/2012	8:03:39 PM	Bypass valve closed
11/20/2012	8:03:39 PM	Bubbler valve closed
11/20/2012	8:03:39 PM	Main Vac valve opened
11/20/2012	8:03:39 PM	Helium MFC set to  0.000000
11/20/2012	8:03:39 PM	H2 MFC set to  0.000000
11/20/2012	8:03:39 PM	BCl3 MFC set to  0.000000
11/20/2012	8:03:39 PM	PH3 MFC set to  0.000000
11/20/2012	8:03:39 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:03:39 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:03:39 PM	Tube furnace set to 150
11/20/2012	8:04:09 PM	H2 valve closed
11/20/2012	8:04:09 PM	BCl3 valve closed
11/20/2012	8:04:09 PM	PH3 valve closed
11/20/2012	8:04:09 PM	SiCl4 pre valve closed
11/20/2012	8:04:09 PM	SiCl4 post valve closed
11/20/2012	8:04:09 PM	Bypass valve closed
11/20/2012	8:04:09 PM	Bubbler valve closed
11/20/2012	8:04:09 PM	Helium valve opened
11/20/2012	8:04:09 PM	Main Vac valve opened
11/20/2012	8:04:09 PM	Helium MFC set to  20.000000
11/20/2012	8:04:09 PM	H2 MFC set to  0.000000
11/20/2012	8:04:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:04:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:04:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:04:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:04:09 PM	Tube furnace set to 150
11/20/2012	8:04:39 PM	Helium valve closed
11/20/2012	8:04:39 PM	H2 valve closed
11/20/2012	8:04:39 PM	BCl3 valve closed
11/20/2012	8:04:39 PM	PH3 valve closed
11/20/2012	8:04:39 PM	SiCl4 pre valve closed
11/20/2012	8:04:39 PM	SiCl4 post valve closed
11/20/2012	8:04:39 PM	Bypass valve closed
11/20/2012	8:04:39 PM	Bubbler valve closed
11/20/2012	8:04:39 PM	Main Vac valve opened
11/20/2012	8:04:39 PM	Helium MFC set to  0.000000
11/20/2012	8:04:39 PM	H2 MFC set to  0.000000
11/20/2012	8:04:39 PM	BCl3 MFC set to  0.000000
11/20/2012	8:04:39 PM	PH3 MFC set to  0.000000
11/20/2012	8:04:39 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:04:39 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:04:39 PM	Tube furnace set to 150
11/20/2012	8:05:09 PM	H2 valve closed
11/20/2012	8:05:09 PM	BCl3 valve closed
11/20/2012	8:05:09 PM	PH3 valve closed
11/20/2012	8:05:09 PM	SiCl4 pre valve closed
11/20/2012	8:05:09 PM	SiCl4 post valve closed
11/20/2012	8:05:09 PM	Bypass valve closed
11/20/2012	8:05:09 PM	Bubbler valve closed
11/20/2012	8:05:09 PM	Helium valve opened
11/20/2012	8:05:09 PM	Main Vac valve opened
11/20/2012	8:05:09 PM	Helium MFC set to  20.000000
11/20/2012	8:05:09 PM	H2 MFC set to  0.000000
11/20/2012	8:05:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:05:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:05:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:05:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:05:10 PM	Tube furnace set to 150
11/20/2012	8:05:40 PM	Helium valve closed
11/20/2012	8:05:40 PM	H2 valve closed
11/20/2012	8:05:40 PM	BCl3 valve closed
11/20/2012	8:05:40 PM	PH3 valve closed
11/20/2012	8:05:40 PM	SiCl4 pre valve closed
11/20/2012	8:05:40 PM	SiCl4 post valve closed
11/20/2012	8:05:40 PM	Bypass valve closed
11/20/2012	8:05:40 PM	Bubbler valve closed
11/20/2012	8:05:40 PM	Main Vac valve opened
11/20/2012	8:05:40 PM	Helium MFC set to  0.000000
11/20/2012	8:05:40 PM	H2 MFC set to  0.000000
11/20/2012	8:05:40 PM	BCl3 MFC set to  0.000000
11/20/2012	8:05:40 PM	PH3 MFC set to  0.000000
11/20/2012	8:05:40 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:05:40 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:05:40 PM	Tube furnace set to 150
11/20/2012	8:06:10 PM	H2 valve closed
11/20/2012	8:06:10 PM	BCl3 valve closed
11/20/2012	8:06:10 PM	PH3 valve closed
11/20/2012	8:06:10 PM	SiCl4 pre valve closed
11/20/2012	8:06:10 PM	SiCl4 post valve closed
11/20/2012	8:06:10 PM	Bypass valve closed
11/20/2012	8:06:10 PM	Bubbler valve closed
11/20/2012	8:06:10 PM	Helium valve opened
11/20/2012	8:06:10 PM	Main Vac valve opened
11/20/2012	8:06:10 PM	Helium MFC set to  20.000000
11/20/2012	8:06:10 PM	H2 MFC set to  0.000000
11/20/2012	8:06:10 PM	BCl3 MFC set to  0.000000
11/20/2012	8:06:10 PM	PH3 MFC set to  0.000000
11/20/2012	8:06:10 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:06:10 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:06:10 PM	Tube furnace set to 150
11/20/2012	8:06:40 PM	Helium valve closed
11/20/2012	8:06:40 PM	H2 valve closed
11/20/2012	8:06:40 PM	BCl3 valve closed
11/20/2012	8:06:40 PM	PH3 valve closed
11/20/2012	8:06:40 PM	SiCl4 pre valve closed
11/20/2012	8:06:40 PM	SiCl4 post valve closed
11/20/2012	8:06:40 PM	Bypass valve closed
11/20/2012	8:06:40 PM	Bubbler valve closed
11/20/2012	8:06:40 PM	Main Vac valve opened
11/20/2012	8:06:40 PM	Helium MFC set to  0.000000
11/20/2012	8:06:40 PM	H2 MFC set to  0.000000
11/20/2012	8:06:40 PM	BCl3 MFC set to  0.000000
11/20/2012	8:06:40 PM	PH3 MFC set to  0.000000
11/20/2012	8:06:40 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:06:40 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:06:40 PM	Tube furnace set to 150
11/20/2012	8:06:41 PM	Run finished at 8:06 PM
11/20/2012	8:38:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	8:38:50 PM	Recipe started at 8:38 PM
11/20/2012	8:38:50 PM	Helium valve closed
11/20/2012	8:38:50 PM	H2 valve closed
11/20/2012	8:38:50 PM	BCl3 valve closed
11/20/2012	8:38:50 PM	PH3 valve closed
11/20/2012	8:38:50 PM	SiCl4 pre valve closed
11/20/2012	8:38:50 PM	SiCl4 post valve closed
11/20/2012	8:38:50 PM	Main Vac valve closed
11/20/2012	8:38:50 PM	Bypass valve closed
11/20/2012	8:38:50 PM	Bubbler valve closed
11/20/2012	8:38:50 PM	Helium MFC set to  0.000000
11/20/2012	8:38:50 PM	H2 MFC set to  0.000000
11/20/2012	8:38:50 PM	BCl3 MFC set to  0.000000
11/20/2012	8:38:50 PM	PH3 MFC set to  0.000000
11/20/2012	8:38:50 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:38:50 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:38:50 PM	Tube furnace set to 0
11/20/2012	8:38:51 PM	Run aborted at 8:38 PM
11/20/2012	8:38:51 PM	Helium valve closed
11/20/2012	8:38:51 PM	H2 valve closed
11/20/2012	8:38:51 PM	BCl3 valve closed
11/20/2012	8:38:51 PM	PH3 valve closed
11/20/2012	8:38:51 PM	SiCl4 pre valve closed
11/20/2012	8:38:51 PM	SiCl4 post valve closed
11/20/2012	8:38:51 PM	Bypass valve closed
11/20/2012	8:38:51 PM	Main Vac valve closed
11/20/2012	8:38:51 PM	Bubbler valve closed
11/20/2012	8:38:51 PM	Helium MFC set to  0.000000
11/20/2012	8:38:51 PM	H2 MFC set to  0.000000
11/20/2012	8:38:51 PM	BCl3 MFC set to  0.000000
11/20/2012	8:38:51 PM	PH3 MFC set to  0.000000
11/20/2012	8:38:51 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:38:51 PM	Tube furnace set to 0
11/20/2012	8:38:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2012	8:38:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	8:38:58 PM	Recipe started at 8:38 PM
11/20/2012	8:38:58 PM	Helium valve closed
11/20/2012	8:38:58 PM	H2 valve closed
11/20/2012	8:38:58 PM	BCl3 valve closed
11/20/2012	8:38:58 PM	PH3 valve closed
11/20/2012	8:38:58 PM	SiCl4 pre valve closed
11/20/2012	8:38:58 PM	SiCl4 post valve closed
11/20/2012	8:38:58 PM	Main Vac valve closed
11/20/2012	8:38:58 PM	Bubbler valve closed
11/20/2012	8:38:58 PM	Bypass valve opened
11/20/2012	8:38:58 PM	Helium MFC set to  0.000000
11/20/2012	8:38:58 PM	H2 MFC set to  0.000000
11/20/2012	8:38:58 PM	BCl3 MFC set to  0.000000
11/20/2012	8:38:58 PM	PH3 MFC set to  0.000000
11/20/2012	8:38:58 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:38:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:38:58 PM	Tube furnace set to 0
11/20/2012	8:38:58 PM	Helium valve closed
11/20/2012	8:38:58 PM	H2 valve closed
11/20/2012	8:38:58 PM	BCl3 valve closed
11/20/2012	8:38:58 PM	PH3 valve closed
11/20/2012	8:38:58 PM	SiCl4 pre valve closed
11/20/2012	8:38:58 PM	SiCl4 post valve closed
11/20/2012	8:38:58 PM	Main Vac valve closed
11/20/2012	8:38:58 PM	Bubbler valve closed
11/20/2012	8:38:58 PM	Bypass valve opened
11/20/2012	8:38:58 PM	Helium MFC set to  0.000000
11/20/2012	8:38:58 PM	H2 MFC set to  0.000000
11/20/2012	8:38:58 PM	BCl3 MFC set to  0.000000
11/20/2012	8:38:58 PM	PH3 MFC set to  0.000000
11/20/2012	8:38:58 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:38:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:38:58 PM	Tube furnace set to 0
11/20/2012	8:39:09 PM	Helium valve closed
11/20/2012	8:39:09 PM	H2 valve closed
11/20/2012	8:39:09 PM	BCl3 valve closed
11/20/2012	8:39:09 PM	PH3 valve closed
11/20/2012	8:39:09 PM	SiCl4 pre valve closed
11/20/2012	8:39:09 PM	SiCl4 post valve closed
11/20/2012	8:39:09 PM	Bypass valve closed
11/20/2012	8:39:09 PM	Bubbler valve closed
11/20/2012	8:39:09 PM	Main Vac valve opened
11/20/2012	8:39:09 PM	Helium MFC set to  0.000000
11/20/2012	8:39:09 PM	H2 MFC set to  0.000000
11/20/2012	8:39:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:39:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:39:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:39:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:39:09 PM	Tube furnace set to 0
11/20/2012	8:39:10 PM	Run finished at 8:39 PM
11/20/2012	8:39:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	8:39:58 PM	Main Vac valve closed
11/20/2012	8:40:05 PM	Main Vac valve opened
11/20/2012	8:40:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/20/2012	8:40:19 PM	Recipe started at 8:40 PM
11/20/2012	8:40:19 PM	Helium valve closed
11/20/2012	8:40:19 PM	H2 valve closed
11/20/2012	8:40:19 PM	BCl3 valve closed
11/20/2012	8:40:19 PM	PH3 valve closed
11/20/2012	8:40:19 PM	SiCl4 pre valve closed
11/20/2012	8:40:19 PM	SiCl4 post valve closed
11/20/2012	8:40:19 PM	Main Vac valve closed
11/20/2012	8:40:19 PM	Bubbler valve closed
11/20/2012	8:40:19 PM	Bypass valve opened
11/20/2012	8:40:19 PM	Helium MFC set to  0.000000
11/20/2012	8:40:19 PM	H2 MFC set to  0.000000
11/20/2012	8:40:19 PM	BCl3 MFC set to  0.000000
11/20/2012	8:40:19 PM	PH3 MFC set to  0.000000
11/20/2012	8:40:19 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:40:19 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:40:19 PM	Tube furnace set to 0
11/20/2012	8:40:19 PM	Helium valve closed
11/20/2012	8:40:19 PM	H2 valve closed
11/20/2012	8:40:19 PM	BCl3 valve closed
11/20/2012	8:40:19 PM	PH3 valve closed
11/20/2012	8:40:19 PM	SiCl4 pre valve closed
11/20/2012	8:40:19 PM	SiCl4 post valve closed
11/20/2012	8:40:19 PM	Main Vac valve closed
11/20/2012	8:40:19 PM	Bubbler valve closed
11/20/2012	8:40:19 PM	Bypass valve opened
11/20/2012	8:40:19 PM	Helium MFC set to  0.000000
11/20/2012	8:40:19 PM	H2 MFC set to  0.000000
11/20/2012	8:40:19 PM	BCl3 MFC set to  0.000000
11/20/2012	8:40:19 PM	PH3 MFC set to  0.000000
11/20/2012	8:40:19 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:40:19 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:40:20 PM	Tube furnace set to 0
11/20/2012	8:40:31 PM	Helium valve closed
11/20/2012	8:40:31 PM	H2 valve closed
11/20/2012	8:40:31 PM	BCl3 valve closed
11/20/2012	8:40:31 PM	PH3 valve closed
11/20/2012	8:40:31 PM	SiCl4 pre valve closed
11/20/2012	8:40:31 PM	SiCl4 post valve closed
11/20/2012	8:40:31 PM	Bypass valve closed
11/20/2012	8:40:31 PM	Bubbler valve closed
11/20/2012	8:40:31 PM	Main Vac valve opened
11/20/2012	8:40:31 PM	Helium MFC set to  0.000000
11/20/2012	8:40:31 PM	H2 MFC set to  0.000000
11/20/2012	8:40:31 PM	BCl3 MFC set to  0.000000
11/20/2012	8:40:31 PM	PH3 MFC set to  0.000000
11/20/2012	8:40:31 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:40:31 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:40:31 PM	Tube furnace set to 0
11/20/2012	8:40:36 PM	H2 valve closed
11/20/2012	8:40:36 PM	BCl3 valve closed
11/20/2012	8:40:36 PM	PH3 valve closed
11/20/2012	8:40:36 PM	SiCl4 pre valve closed
11/20/2012	8:40:36 PM	SiCl4 post valve closed
11/20/2012	8:40:36 PM	Bypass valve closed
11/20/2012	8:40:36 PM	Bubbler valve closed
11/20/2012	8:40:36 PM	Helium valve opened
11/20/2012	8:40:36 PM	Main Vac valve opened
11/20/2012	8:40:36 PM	Helium MFC set to  20.000000
11/20/2012	8:40:36 PM	H2 MFC set to  0.000000
11/20/2012	8:40:36 PM	BCl3 MFC set to  0.000000
11/20/2012	8:40:36 PM	PH3 MFC set to  0.000000
11/20/2012	8:40:36 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:40:36 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:40:36 PM	Tube furnace set to 0
11/20/2012	8:41:06 PM	Helium valve closed
11/20/2012	8:41:06 PM	H2 valve closed
11/20/2012	8:41:06 PM	BCl3 valve closed
11/20/2012	8:41:06 PM	PH3 valve closed
11/20/2012	8:41:06 PM	SiCl4 pre valve closed
11/20/2012	8:41:06 PM	SiCl4 post valve closed
11/20/2012	8:41:06 PM	Bypass valve closed
11/20/2012	8:41:06 PM	Bubbler valve closed
11/20/2012	8:41:06 PM	Main Vac valve opened
11/20/2012	8:41:06 PM	Helium MFC set to  0.000000
11/20/2012	8:41:06 PM	H2 MFC set to  0.000000
11/20/2012	8:41:06 PM	BCl3 MFC set to  0.000000
11/20/2012	8:41:06 PM	PH3 MFC set to  0.000000
11/20/2012	8:41:06 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:41:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:41:07 PM	Tube furnace set to 0
11/20/2012	8:41:37 PM	H2 valve closed
11/20/2012	8:41:37 PM	BCl3 valve closed
11/20/2012	8:41:37 PM	PH3 valve closed
11/20/2012	8:41:37 PM	SiCl4 pre valve closed
11/20/2012	8:41:37 PM	SiCl4 post valve closed
11/20/2012	8:41:37 PM	Bypass valve closed
11/20/2012	8:41:37 PM	Bubbler valve closed
11/20/2012	8:41:37 PM	Helium valve opened
11/20/2012	8:41:37 PM	Main Vac valve opened
11/20/2012	8:41:37 PM	Helium MFC set to  20.000000
11/20/2012	8:41:37 PM	H2 MFC set to  0.000000
11/20/2012	8:41:37 PM	BCl3 MFC set to  0.000000
11/20/2012	8:41:37 PM	PH3 MFC set to  0.000000
11/20/2012	8:41:37 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:41:37 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:41:37 PM	Tube furnace set to 0
11/20/2012	8:42:07 PM	Helium valve closed
11/20/2012	8:42:07 PM	H2 valve closed
11/20/2012	8:42:07 PM	BCl3 valve closed
11/20/2012	8:42:07 PM	PH3 valve closed
11/20/2012	8:42:07 PM	SiCl4 pre valve closed
11/20/2012	8:42:07 PM	SiCl4 post valve closed
11/20/2012	8:42:07 PM	Bypass valve closed
11/20/2012	8:42:07 PM	Bubbler valve closed
11/20/2012	8:42:07 PM	Main Vac valve opened
11/20/2012	8:42:07 PM	Helium MFC set to  0.000000
11/20/2012	8:42:07 PM	H2 MFC set to  0.000000
11/20/2012	8:42:07 PM	BCl3 MFC set to  0.000000
11/20/2012	8:42:07 PM	PH3 MFC set to  0.000000
11/20/2012	8:42:07 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:42:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:42:07 PM	Tube furnace set to 0
11/20/2012	8:42:37 PM	H2 valve closed
11/20/2012	8:42:37 PM	BCl3 valve closed
11/20/2012	8:42:37 PM	PH3 valve closed
11/20/2012	8:42:37 PM	SiCl4 pre valve closed
11/20/2012	8:42:37 PM	SiCl4 post valve closed
11/20/2012	8:42:37 PM	Bypass valve closed
11/20/2012	8:42:37 PM	Bubbler valve closed
11/20/2012	8:42:37 PM	Helium valve opened
11/20/2012	8:42:37 PM	Main Vac valve opened
11/20/2012	8:42:37 PM	Helium MFC set to  20.000000
11/20/2012	8:42:37 PM	H2 MFC set to  0.000000
11/20/2012	8:42:37 PM	BCl3 MFC set to  0.000000
11/20/2012	8:42:37 PM	PH3 MFC set to  0.000000
11/20/2012	8:42:37 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:42:37 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:42:37 PM	Tube furnace set to 0
11/20/2012	8:43:07 PM	Helium valve closed
11/20/2012	8:43:07 PM	H2 valve closed
11/20/2012	8:43:07 PM	BCl3 valve closed
11/20/2012	8:43:07 PM	PH3 valve closed
11/20/2012	8:43:07 PM	SiCl4 pre valve closed
11/20/2012	8:43:07 PM	SiCl4 post valve closed
11/20/2012	8:43:07 PM	Bypass valve closed
11/20/2012	8:43:07 PM	Bubbler valve closed
11/20/2012	8:43:07 PM	Main Vac valve opened
11/20/2012	8:43:07 PM	Helium MFC set to  0.000000
11/20/2012	8:43:07 PM	H2 MFC set to  0.000000
11/20/2012	8:43:07 PM	BCl3 MFC set to  0.000000
11/20/2012	8:43:07 PM	PH3 MFC set to  0.000000
11/20/2012	8:43:07 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:43:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:43:08 PM	Tube furnace set to 0
11/20/2012	8:43:38 PM	H2 valve closed
11/20/2012	8:43:38 PM	BCl3 valve closed
11/20/2012	8:43:38 PM	PH3 valve closed
11/20/2012	8:43:38 PM	SiCl4 pre valve closed
11/20/2012	8:43:38 PM	SiCl4 post valve closed
11/20/2012	8:43:38 PM	Bypass valve closed
11/20/2012	8:43:38 PM	Bubbler valve closed
11/20/2012	8:43:38 PM	Helium valve opened
11/20/2012	8:43:38 PM	Main Vac valve opened
11/20/2012	8:43:38 PM	Helium MFC set to  20.000000
11/20/2012	8:43:38 PM	H2 MFC set to  0.000000
11/20/2012	8:43:38 PM	BCl3 MFC set to  0.000000
11/20/2012	8:43:38 PM	PH3 MFC set to  0.000000
11/20/2012	8:43:38 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:43:38 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:43:38 PM	Tube furnace set to 0
11/20/2012	8:44:08 PM	Helium valve closed
11/20/2012	8:44:08 PM	H2 valve closed
11/20/2012	8:44:08 PM	BCl3 valve closed
11/20/2012	8:44:08 PM	PH3 valve closed
11/20/2012	8:44:08 PM	SiCl4 pre valve closed
11/20/2012	8:44:08 PM	SiCl4 post valve closed
11/20/2012	8:44:08 PM	Bypass valve closed
11/20/2012	8:44:08 PM	Bubbler valve closed
11/20/2012	8:44:08 PM	Main Vac valve opened
11/20/2012	8:44:08 PM	Helium MFC set to  0.000000
11/20/2012	8:44:08 PM	H2 MFC set to  0.000000
11/20/2012	8:44:08 PM	BCl3 MFC set to  0.000000
11/20/2012	8:44:08 PM	PH3 MFC set to  0.000000
11/20/2012	8:44:08 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:44:08 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:44:08 PM	Tube furnace set to 0
11/20/2012	8:44:38 PM	H2 valve closed
11/20/2012	8:44:38 PM	BCl3 valve closed
11/20/2012	8:44:38 PM	PH3 valve closed
11/20/2012	8:44:38 PM	SiCl4 pre valve closed
11/20/2012	8:44:38 PM	SiCl4 post valve closed
11/20/2012	8:44:38 PM	Bypass valve closed
11/20/2012	8:44:38 PM	Bubbler valve closed
11/20/2012	8:44:38 PM	Helium valve opened
11/20/2012	8:44:38 PM	Main Vac valve opened
11/20/2012	8:44:38 PM	Helium MFC set to  20.000000
11/20/2012	8:44:38 PM	H2 MFC set to  0.000000
11/20/2012	8:44:38 PM	BCl3 MFC set to  0.000000
11/20/2012	8:44:38 PM	PH3 MFC set to  0.000000
11/20/2012	8:44:38 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:44:38 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:44:38 PM	Tube furnace set to 0
11/20/2012	8:45:08 PM	Helium valve closed
11/20/2012	8:45:08 PM	H2 valve closed
11/20/2012	8:45:08 PM	BCl3 valve closed
11/20/2012	8:45:08 PM	PH3 valve closed
11/20/2012	8:45:08 PM	SiCl4 pre valve closed
11/20/2012	8:45:08 PM	SiCl4 post valve closed
11/20/2012	8:45:08 PM	Bypass valve closed
11/20/2012	8:45:08 PM	Bubbler valve closed
11/20/2012	8:45:08 PM	Main Vac valve opened
11/20/2012	8:45:08 PM	Helium MFC set to  0.000000
11/20/2012	8:45:08 PM	H2 MFC set to  0.000000
11/20/2012	8:45:08 PM	BCl3 MFC set to  0.000000
11/20/2012	8:45:08 PM	PH3 MFC set to  0.000000
11/20/2012	8:45:08 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:45:08 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:45:09 PM	Tube furnace set to 0
11/20/2012	8:45:39 PM	H2 valve closed
11/20/2012	8:45:39 PM	BCl3 valve closed
11/20/2012	8:45:39 PM	PH3 valve closed
11/20/2012	8:45:39 PM	SiCl4 pre valve closed
11/20/2012	8:45:39 PM	SiCl4 post valve closed
11/20/2012	8:45:39 PM	Bypass valve closed
11/20/2012	8:45:39 PM	Bubbler valve closed
11/20/2012	8:45:39 PM	Helium valve opened
11/20/2012	8:45:39 PM	Main Vac valve opened
11/20/2012	8:45:39 PM	Helium MFC set to  20.000000
11/20/2012	8:45:39 PM	H2 MFC set to  0.000000
11/20/2012	8:45:39 PM	BCl3 MFC set to  0.000000
11/20/2012	8:45:39 PM	PH3 MFC set to  0.000000
11/20/2012	8:45:39 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:45:39 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:45:39 PM	Tube furnace set to 0
11/20/2012	8:46:09 PM	Helium valve closed
11/20/2012	8:46:09 PM	H2 valve closed
11/20/2012	8:46:09 PM	BCl3 valve closed
11/20/2012	8:46:09 PM	PH3 valve closed
11/20/2012	8:46:09 PM	SiCl4 pre valve closed
11/20/2012	8:46:09 PM	SiCl4 post valve closed
11/20/2012	8:46:09 PM	Bypass valve closed
11/20/2012	8:46:09 PM	Bubbler valve closed
11/20/2012	8:46:09 PM	Main Vac valve opened
11/20/2012	8:46:09 PM	Helium MFC set to  0.000000
11/20/2012	8:46:09 PM	H2 MFC set to  0.000000
11/20/2012	8:46:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:46:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:46:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:46:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:46:09 PM	Tube furnace set to 0
11/20/2012	8:46:39 PM	H2 valve closed
11/20/2012	8:46:39 PM	BCl3 valve closed
11/20/2012	8:46:39 PM	PH3 valve closed
11/20/2012	8:46:39 PM	SiCl4 pre valve closed
11/20/2012	8:46:39 PM	SiCl4 post valve closed
11/20/2012	8:46:39 PM	Bypass valve closed
11/20/2012	8:46:39 PM	Bubbler valve closed
11/20/2012	8:46:39 PM	Helium valve opened
11/20/2012	8:46:39 PM	Main Vac valve opened
11/20/2012	8:46:39 PM	Helium MFC set to  20.000000
11/20/2012	8:46:39 PM	H2 MFC set to  0.000000
11/20/2012	8:46:39 PM	BCl3 MFC set to  0.000000
11/20/2012	8:46:39 PM	PH3 MFC set to  0.000000
11/20/2012	8:46:39 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:46:39 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:46:39 PM	Tube furnace set to 0
11/20/2012	8:47:09 PM	Helium valve closed
11/20/2012	8:47:09 PM	H2 valve closed
11/20/2012	8:47:09 PM	BCl3 valve closed
11/20/2012	8:47:09 PM	PH3 valve closed
11/20/2012	8:47:09 PM	SiCl4 pre valve closed
11/20/2012	8:47:09 PM	SiCl4 post valve closed
11/20/2012	8:47:09 PM	Bypass valve closed
11/20/2012	8:47:09 PM	Bubbler valve closed
11/20/2012	8:47:09 PM	Main Vac valve opened
11/20/2012	8:47:09 PM	Helium MFC set to  0.000000
11/20/2012	8:47:09 PM	H2 MFC set to  0.000000
11/20/2012	8:47:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:47:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:47:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:47:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:47:10 PM	Tube furnace set to 0
11/20/2012	8:47:40 PM	H2 valve closed
11/20/2012	8:47:40 PM	BCl3 valve closed
11/20/2012	8:47:40 PM	PH3 valve closed
11/20/2012	8:47:40 PM	SiCl4 pre valve closed
11/20/2012	8:47:40 PM	SiCl4 post valve closed
11/20/2012	8:47:40 PM	Bypass valve closed
11/20/2012	8:47:40 PM	Bubbler valve closed
11/20/2012	8:47:40 PM	Helium valve opened
11/20/2012	8:47:40 PM	Main Vac valve opened
11/20/2012	8:47:40 PM	Helium MFC set to  20.000000
11/20/2012	8:47:40 PM	H2 MFC set to  0.000000
11/20/2012	8:47:40 PM	BCl3 MFC set to  0.000000
11/20/2012	8:47:40 PM	PH3 MFC set to  0.000000
11/20/2012	8:47:40 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:47:40 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:47:40 PM	Tube furnace set to 0
11/20/2012	8:48:10 PM	Helium valve closed
11/20/2012	8:48:10 PM	H2 valve closed
11/20/2012	8:48:10 PM	BCl3 valve closed
11/20/2012	8:48:10 PM	PH3 valve closed
11/20/2012	8:48:10 PM	SiCl4 pre valve closed
11/20/2012	8:48:10 PM	SiCl4 post valve closed
11/20/2012	8:48:10 PM	Bypass valve closed
11/20/2012	8:48:10 PM	Bubbler valve closed
11/20/2012	8:48:10 PM	Main Vac valve opened
11/20/2012	8:48:10 PM	Helium MFC set to  0.000000
11/20/2012	8:48:10 PM	H2 MFC set to  0.000000
11/20/2012	8:48:10 PM	BCl3 MFC set to  0.000000
11/20/2012	8:48:10 PM	PH3 MFC set to  0.000000
11/20/2012	8:48:10 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:48:10 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:48:10 PM	Tube furnace set to 0
11/20/2012	8:48:40 PM	H2 valve closed
11/20/2012	8:48:40 PM	BCl3 valve closed
11/20/2012	8:48:40 PM	PH3 valve closed
11/20/2012	8:48:40 PM	SiCl4 pre valve closed
11/20/2012	8:48:40 PM	SiCl4 post valve closed
11/20/2012	8:48:40 PM	Bypass valve closed
11/20/2012	8:48:40 PM	Bubbler valve closed
11/20/2012	8:48:40 PM	Helium valve opened
11/20/2012	8:48:40 PM	Main Vac valve opened
11/20/2012	8:48:40 PM	Helium MFC set to  20.000000
11/20/2012	8:48:40 PM	H2 MFC set to  0.000000
11/20/2012	8:48:40 PM	BCl3 MFC set to  0.000000
11/20/2012	8:48:40 PM	PH3 MFC set to  0.000000
11/20/2012	8:48:40 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:48:40 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:48:40 PM	Tube furnace set to 0
11/20/2012	8:49:10 PM	Helium valve closed
11/20/2012	8:49:10 PM	H2 valve closed
11/20/2012	8:49:10 PM	BCl3 valve closed
11/20/2012	8:49:10 PM	PH3 valve closed
11/20/2012	8:49:10 PM	SiCl4 pre valve closed
11/20/2012	8:49:10 PM	SiCl4 post valve closed
11/20/2012	8:49:10 PM	Bypass valve closed
11/20/2012	8:49:10 PM	Bubbler valve closed
11/20/2012	8:49:10 PM	Main Vac valve opened
11/20/2012	8:49:10 PM	Helium MFC set to  0.000000
11/20/2012	8:49:10 PM	H2 MFC set to  0.000000
11/20/2012	8:49:10 PM	BCl3 MFC set to  0.000000
11/20/2012	8:49:10 PM	PH3 MFC set to  0.000000
11/20/2012	8:49:10 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:49:10 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:49:11 PM	Tube furnace set to 0
11/20/2012	8:49:41 PM	H2 valve closed
11/20/2012	8:49:41 PM	BCl3 valve closed
11/20/2012	8:49:41 PM	PH3 valve closed
11/20/2012	8:49:41 PM	SiCl4 pre valve closed
11/20/2012	8:49:41 PM	SiCl4 post valve closed
11/20/2012	8:49:41 PM	Bypass valve closed
11/20/2012	8:49:41 PM	Bubbler valve closed
11/20/2012	8:49:41 PM	Helium valve opened
11/20/2012	8:49:41 PM	Main Vac valve opened
11/20/2012	8:49:41 PM	Helium MFC set to  20.000000
11/20/2012	8:49:41 PM	H2 MFC set to  0.000000
11/20/2012	8:49:41 PM	BCl3 MFC set to  0.000000
11/20/2012	8:49:41 PM	PH3 MFC set to  0.000000
11/20/2012	8:49:41 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:49:41 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:49:41 PM	Tube furnace set to 0
11/20/2012	8:50:11 PM	Helium valve closed
11/20/2012	8:50:11 PM	H2 valve closed
11/20/2012	8:50:11 PM	BCl3 valve closed
11/20/2012	8:50:11 PM	PH3 valve closed
11/20/2012	8:50:11 PM	SiCl4 pre valve closed
11/20/2012	8:50:11 PM	SiCl4 post valve closed
11/20/2012	8:50:11 PM	Bypass valve closed
11/20/2012	8:50:11 PM	Bubbler valve closed
11/20/2012	8:50:11 PM	Main Vac valve opened
11/20/2012	8:50:11 PM	Helium MFC set to  0.000000
11/20/2012	8:50:11 PM	H2 MFC set to  0.000000
11/20/2012	8:50:11 PM	BCl3 MFC set to  0.000000
11/20/2012	8:50:11 PM	PH3 MFC set to  0.000000
11/20/2012	8:50:11 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:50:11 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:50:11 PM	Tube furnace set to 0
11/20/2012	8:50:12 PM	Run finished at 8:50 PM
11/20/2012	8:50:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/20/2012	8:50:36 PM	Main Vac valve closed
11/20/2012	8:50:48 PM	Main Vac valve opened
11/20/2012	8:53:08 PM	Recipe started at 8:53 PM
11/20/2012	8:53:09 PM	Helium valve closed
11/20/2012	8:53:09 PM	H2 valve closed
11/20/2012	8:53:09 PM	BCl3 valve closed
11/20/2012	8:53:09 PM	PH3 valve closed
11/20/2012	8:53:09 PM	SiCl4 pre valve closed
11/20/2012	8:53:09 PM	SiCl4 post valve closed
11/20/2012	8:53:09 PM	Bypass valve closed
11/20/2012	8:53:09 PM	Bubbler valve closed
11/20/2012	8:53:09 PM	Main Vac valve opened
11/20/2012	8:53:09 PM	Helium MFC set to  0.000000
11/20/2012	8:53:09 PM	H2 MFC set to  0.000000
11/20/2012	8:53:09 PM	BCl3 MFC set to  0.000000
11/20/2012	8:53:09 PM	PH3 MFC set to  0.000000
11/20/2012	8:53:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	8:53:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	8:53:09 PM	Tube furnace set to 0
11/20/2012	9:23:09 PM	Helium valve closed
11/20/2012	9:23:09 PM	H2 valve closed
11/20/2012	9:23:09 PM	BCl3 valve closed
11/20/2012	9:23:09 PM	PH3 valve closed
11/20/2012	9:23:09 PM	SiCl4 pre valve closed
11/20/2012	9:23:09 PM	SiCl4 post valve closed
11/20/2012	9:23:09 PM	Main Vac valve closed
11/20/2012	9:23:09 PM	Bypass valve closed
11/20/2012	9:23:09 PM	Bubbler valve closed
11/20/2012	9:23:09 PM	Helium MFC set to  0.000000
11/20/2012	9:23:09 PM	H2 MFC set to  0.000000
11/20/2012	9:23:09 PM	BCl3 MFC set to  0.000000
11/20/2012	9:23:09 PM	PH3 MFC set to  0.000000
11/20/2012	9:23:09 PM	SiCl4 MFC set to  0.000000
11/20/2012	9:23:09 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:23:09 PM	Tube furnace set to 0
11/20/2012	9:23:12 PM	Helium valve closed
11/20/2012	9:23:12 PM	BCl3 valve closed
11/20/2012	9:23:12 PM	PH3 valve closed
11/20/2012	9:23:12 PM	SiCl4 pre valve closed
11/20/2012	9:23:12 PM	SiCl4 post valve closed
11/20/2012	9:23:12 PM	Main Vac valve closed
11/20/2012	9:23:12 PM	Bypass valve closed
11/20/2012	9:23:12 PM	Bubbler valve closed
11/20/2012	9:23:12 PM	H2 valve opened
11/20/2012	9:23:12 PM	Helium MFC set to  0.000000
11/20/2012	9:23:12 PM	H2 MFC set to  500.000000
11/20/2012	9:23:12 PM	BCl3 MFC set to  0.000000
11/20/2012	9:23:12 PM	PH3 MFC set to  0.000000
11/20/2012	9:23:12 PM	SiCl4 MFC set to  0.000000
11/20/2012	9:23:12 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:23:12 PM	Tube furnace set to 0
11/20/2012	9:24:27 PM	Helium valve closed
11/20/2012	9:24:27 PM	BCl3 valve closed
11/20/2012	9:24:27 PM	PH3 valve closed
11/20/2012	9:24:27 PM	SiCl4 pre valve closed
11/20/2012	9:24:27 PM	SiCl4 post valve closed
11/20/2012	9:24:27 PM	Main Vac valve closed
11/20/2012	9:24:27 PM	Bypass valve closed
11/20/2012	9:24:27 PM	H2 valve opened
11/20/2012	9:24:27 PM	Bubbler valve opened
11/20/2012	9:24:27 PM	Helium MFC set to  0.000000
11/20/2012	9:24:27 PM	H2 MFC set to  500.000000
11/20/2012	9:24:27 PM	BCl3 MFC set to  0.000000
11/20/2012	9:24:27 PM	PH3 MFC set to  0.000000
11/20/2012	9:24:27 PM	SiCl4 MFC set to  0.000000
11/20/2012	9:24:27 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:24:27 PM	Tube furnace set to 0
11/20/2012	9:24:28 PM	Helium valve closed
11/20/2012	9:24:28 PM	BCl3 valve closed
11/20/2012	9:24:28 PM	PH3 valve closed
11/20/2012	9:24:28 PM	SiCl4 pre valve closed
11/20/2012	9:24:28 PM	SiCl4 post valve closed
11/20/2012	9:24:28 PM	Main Vac valve closed
11/20/2012	9:24:28 PM	Bypass valve closed
11/20/2012	9:24:28 PM	H2 valve opened
11/20/2012	9:24:28 PM	Bubbler valve opened
11/20/2012	9:24:28 PM	Helium MFC set to  0.000000
11/20/2012	9:24:28 PM	H2 MFC set to  450.000000
11/20/2012	9:24:28 PM	BCl3 MFC set to  0.000000
11/20/2012	9:24:28 PM	PH3 MFC set to  0.000000
11/20/2012	9:24:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	9:24:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:24:28 PM	Tube furnace set to 1000
11/20/2012	9:49:28 PM	Helium valve closed
11/20/2012	9:49:28 PM	PH3 valve closed
11/20/2012	9:49:28 PM	Main Vac valve closed
11/20/2012	9:49:28 PM	Bypass valve closed
11/20/2012	9:49:28 PM	H2 valve opened
11/20/2012	9:49:28 PM	BCl3 valve opened
11/20/2012	9:49:28 PM	SiCl4 pre valve opened
11/20/2012	9:49:28 PM	SiCl4 post valve opened
11/20/2012	9:49:28 PM	Bubbler valve opened
11/20/2012	9:49:28 PM	Helium MFC set to  0.000000
11/20/2012	9:49:28 PM	H2 MFC set to  450.000000
11/20/2012	9:49:28 PM	BCl3 MFC set to  1.500000
11/20/2012	9:49:28 PM	PH3 MFC set to  0.000000
11/20/2012	9:49:28 PM	SiCl4 MFC set to  50.000000
11/20/2012	9:49:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:49:28 PM	Tube furnace set to 1000
11/20/2012	9:57:28 PM	Helium valve closed
11/20/2012	9:57:28 PM	BCl3 valve closed
11/20/2012	9:57:28 PM	PH3 valve closed
11/20/2012	9:57:28 PM	SiCl4 pre valve closed
11/20/2012	9:57:28 PM	SiCl4 post valve closed
11/20/2012	9:57:28 PM	Main Vac valve closed
11/20/2012	9:57:28 PM	Bypass valve closed
11/20/2012	9:57:28 PM	H2 valve opened
11/20/2012	9:57:28 PM	Bubbler valve opened
11/20/2012	9:57:28 PM	Helium MFC set to  0.000000
11/20/2012	9:57:28 PM	H2 MFC set to  500.000000
11/20/2012	9:57:28 PM	BCl3 MFC set to  0.000000
11/20/2012	9:57:28 PM	PH3 MFC set to  0.000000
11/20/2012	9:57:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	9:57:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	9:57:28 PM	Tube furnace set to 750
11/20/2012	10:02:28 PM	H2 valve closed
11/20/2012	10:02:28 PM	BCl3 valve closed
11/20/2012	10:02:28 PM	PH3 valve closed
11/20/2012	10:02:28 PM	SiCl4 pre valve closed
11/20/2012	10:02:28 PM	SiCl4 post valve closed
11/20/2012	10:02:28 PM	Main Vac valve closed
11/20/2012	10:02:28 PM	Bypass valve closed
11/20/2012	10:02:28 PM	Helium valve opened
11/20/2012	10:02:28 PM	Bubbler valve opened
11/20/2012	10:02:28 PM	Helium MFC set to  500.000000
11/20/2012	10:02:28 PM	H2 MFC set to  0.000000
11/20/2012	10:02:28 PM	BCl3 MFC set to  0.000000
11/20/2012	10:02:28 PM	PH3 MFC set to  0.000000
11/20/2012	10:02:28 PM	SiCl4 MFC set to  0.000000
11/20/2012	10:02:28 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	10:02:29 PM	Tube furnace set to 0
11/20/2012	10:22:29 PM	Helium valve closed
11/20/2012	10:22:29 PM	H2 valve closed
11/20/2012	10:22:29 PM	BCl3 valve closed
11/20/2012	10:22:29 PM	PH3 valve closed
11/20/2012	10:22:29 PM	SiCl4 pre valve closed
11/20/2012	10:22:29 PM	SiCl4 post valve closed
11/20/2012	10:22:29 PM	Main Vac valve closed
11/20/2012	10:22:29 PM	Bypass valve closed
11/20/2012	10:22:29 PM	Bubbler valve closed
11/20/2012	10:22:29 PM	Helium MFC set to  0.000000
11/20/2012	10:22:29 PM	H2 MFC set to  0.000000
11/20/2012	10:22:29 PM	BCl3 MFC set to  0.000000
11/20/2012	10:22:29 PM	PH3 MFC set to  0.000000
11/20/2012	10:22:29 PM	SiCl4 MFC set to  0.000000
11/20/2012	10:22:29 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	10:22:29 PM	Tube furnace set to 0
11/20/2012	10:22:30 PM	Run finished at 10:22 PM
11/20/2012	10:38:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	10:38:29 PM	Recipe started at 10:38 PM
11/20/2012	10:38:29 PM	Helium valve closed
11/20/2012	10:38:29 PM	H2 valve closed
11/20/2012	10:38:29 PM	BCl3 valve closed
11/20/2012	10:38:29 PM	PH3 valve closed
11/20/2012	10:38:29 PM	SiCl4 pre valve closed
11/20/2012	10:38:29 PM	SiCl4 post valve closed
11/20/2012	10:38:29 PM	Main Vac valve closed
11/20/2012	10:38:29 PM	Bubbler valve closed
11/20/2012	10:38:30 PM	Bypass valve opened
11/20/2012	10:38:30 PM	Helium MFC set to  0.000000
11/20/2012	10:38:30 PM	H2 MFC set to  0.000000
11/20/2012	10:38:30 PM	BCl3 MFC set to  0.000000
11/20/2012	10:38:30 PM	PH3 MFC set to  0.000000
11/20/2012	10:38:30 PM	SiCl4 MFC set to  0.000000
11/20/2012	10:38:30 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	10:38:30 PM	Tube furnace set to 0
11/20/2012	10:39:43 PM	Helium valve closed
11/20/2012	10:39:43 PM	H2 valve closed
11/20/2012	10:39:43 PM	BCl3 valve closed
11/20/2012	10:39:43 PM	PH3 valve closed
11/20/2012	10:39:43 PM	SiCl4 pre valve closed
11/20/2012	10:39:43 PM	SiCl4 post valve closed
11/20/2012	10:39:43 PM	Main Vac valve closed
11/20/2012	10:39:43 PM	Bubbler valve closed
11/20/2012	10:39:43 PM	Bypass valve opened
11/20/2012	10:39:43 PM	Helium MFC set to  0.000000
11/20/2012	10:39:43 PM	H2 MFC set to  0.000000
11/20/2012	10:39:43 PM	BCl3 MFC set to  0.000000
11/20/2012	10:39:43 PM	PH3 MFC set to  0.000000
11/20/2012	10:39:43 PM	SiCl4 MFC set to  0.000000
11/20/2012	10:39:43 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	10:39:43 PM	Tube furnace set to 0
11/20/2012	10:39:55 PM	Helium valve closed
11/20/2012	10:39:55 PM	H2 valve closed
11/20/2012	10:39:55 PM	BCl3 valve closed
11/20/2012	10:39:55 PM	PH3 valve closed
11/20/2012	10:39:55 PM	SiCl4 pre valve closed
11/20/2012	10:39:55 PM	SiCl4 post valve closed
11/20/2012	10:39:55 PM	Bypass valve closed
11/20/2012	10:39:55 PM	Bubbler valve closed
11/20/2012	10:39:55 PM	Main Vac valve opened
11/20/2012	10:39:55 PM	Helium MFC set to  0.000000
11/20/2012	10:39:55 PM	H2 MFC set to  0.000000
11/20/2012	10:39:55 PM	BCl3 MFC set to  0.000000
11/20/2012	10:39:55 PM	PH3 MFC set to  0.000000
11/20/2012	10:39:55 PM	SiCl4 MFC set to  0.000000
11/20/2012	10:39:55 PM	Bypass solenoid MFC set to  0.000000
11/20/2012	10:39:55 PM	Tube furnace set to 0
11/20/2012	10:39:56 PM	Run finished at 10:39 PM
11/20/2012	10:39:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2012	10:40:05 PM	Tube furnace set to 150
